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Focussed MeV ion beam implanted waveguides

Abstract

Single mode buried optical waveguides have been fabricated in fused silica by MeV proton implantation using a focussed hydrogen ion beam. The technique has the potential to direct write waveguide devices and produce multi-layered structures, without the need for intermediate steps such as mask fabrication or layered depositions. A micron resolution Confocal Raman Spectrometer has been used to map the distribution of atomic vacancies that forms the waveguiding region. The results are compared with theoretical calculations. Losses of 3 dB cm{sup -1} have been measured in unannealed samples, which decreases to less than 0.5 dB cm{sup -1} after annealing at 500 degrees Celsius. We describe methods for determining the refractive index distribution of single mode buried waveguides from their output intensity distributions via an inversion of the scalar wave equation. (authors). 5 figs.
Authors:
Von Bibra, M L; Roberts, A; Nugent, K; Jamieson, D N [1] 
  1. Melbourne Univ., Parkville, VIC (Australia). School of Physics
Publication Date:
Dec 31, 1996
Product Type:
Miscellaneous
Report Number:
INIS-AU-0003; CONF-9511295-
Reference Number:
SCA: 665300; PA: AIX-28:058229; EDB-97:123151; SN: 97001842290
Resource Relation:
Conference: 9. Australian conference on nuclear technique of analysis, Newcastle (Australia), 27-29 Nov 1995; Other Information: PBD: [1996]; Related Information: Is Part Of 9th Australian conference on nuclear techniques of analysis. Proceedings; PB: 186 p.
Subject:
66 PHYSICS; WAVEGUIDES; ION IMPLANTATION; EXPERIMENTAL DATA; HYDROGEN IONS; RAMAN SPECTRA; SILICON; VACANCIES; WAVE EQUATIONS
OSTI ID:
520672
Research Organizations:
Australian Inst. of Nuclear Science and Engineering, Lucas Heights, NSW (Australia)
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97638268; TRN: AU9716169058229
Availability:
INIS; OSTI as DE97638268
Submitting Site:
AUN
Size:
pp. 83-84
Announcement Date:
Sep 23, 1997

Citation Formats

Von Bibra, M L, Roberts, A, Nugent, K, and Jamieson, D N. Focussed MeV ion beam implanted waveguides. Australia: N. p., 1996. Web.
Von Bibra, M L, Roberts, A, Nugent, K, & Jamieson, D N. Focussed MeV ion beam implanted waveguides. Australia.
Von Bibra, M L, Roberts, A, Nugent, K, and Jamieson, D N. 1996. "Focussed MeV ion beam implanted waveguides." Australia.
@misc{etde_520672,
title = {Focussed MeV ion beam implanted waveguides}
author = {Von Bibra, M L, Roberts, A, Nugent, K, and Jamieson, D N}
abstractNote = {Single mode buried optical waveguides have been fabricated in fused silica by MeV proton implantation using a focussed hydrogen ion beam. The technique has the potential to direct write waveguide devices and produce multi-layered structures, without the need for intermediate steps such as mask fabrication or layered depositions. A micron resolution Confocal Raman Spectrometer has been used to map the distribution of atomic vacancies that forms the waveguiding region. The results are compared with theoretical calculations. Losses of 3 dB cm{sup -1} have been measured in unannealed samples, which decreases to less than 0.5 dB cm{sup -1} after annealing at 500 degrees Celsius. We describe methods for determining the refractive index distribution of single mode buried waveguides from their output intensity distributions via an inversion of the scalar wave equation. (authors). 5 figs.}
place = {Australia}
year = {1996}
month = {Dec}
}