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Elastic recoil detection analysis of ferroelectric films

Abstract

There has been considerable progress in developing SrBi{sub 2}Ta{sub 2}O{sub 9} (SBT) and Ba{sub O.7}Sr{sub O.3}TiO{sub 3} (BST) ferroelectric films for use as nonvolatile memory chips and for capacitors in dynamic random access memories (DRAMs). Ferroelectric materials have a very large dielectric constant ( {approx} 1000), approximately one hundred times greater than that of silicon dioxide. Devices made from these materials have been known to experience breakdown after a repeated voltage pulsing. It has been suggested that this is related to stoichiometric changes within the material. To accurately characterise these materials Elastic Recoil Detection Analysis (ERDA) is being developed. This technique employs a high energy heavy ion beam to eject nuclei from the target and uses a time of flight and energy dispersive (ToF-E) detector telescope to detect these nuclei. The recoil nuclei carry both energy and mass information which enables the determination of separate energy spectra for individual elements or for small groups of elements In this work ERDA employing 77 MeV {sup 127}I ions has been used to analyse Strontium Bismuth Tantalate thin films at the heavy ion recoil facility at ANSTO, Lucas Heights. 9 refs., 5 figs.
Authors:
Stannard, W B; Johnston, P N; Walker, S R; Bubb, I F; [1]  Scott, J F; [2]  Cohen, D D; Dytlewski, N [3] 
  1. Royal Melbourne Inst. of Tech., VIC (Australia)
  2. New South Wales Univ., Kensington, NSW (Australia)
  3. Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
Publication Date:
Dec 31, 1996
Product Type:
Miscellaneous
Report Number:
INIS-AU-0003; CONF-9511295-
Reference Number:
SCA: 661300; 665100; PA: AIX-28:057668; EDB-97:122058; SN: 97001841827
Resource Relation:
Conference: 9. Australian conference on nuclear technique of analysis, Newcastle (Australia), 27-29 Nov 1995; Other Information: PBD: [1996]; Related Information: Is Part Of 9th Australian conference on nuclear techniques of analysis. Proceedings; PB: 186 p.
Subject:
66 PHYSICS; FERROELECTRIC MATERIALS; ION SCATTERING ANALYSIS; CALIBRATION; ELASTIC SCATTERING; EXPERIMENTAL DATA; IODINE 127; MEV RANGE 10-100; QUANTITATIVE CHEMICAL ANALYSIS; RECOILS; TANTALUM COMPOUNDS; THIN FILMS; TIME-OF-FLIGHT METHOD; TITANIUM COMPOUNDS
Sponsoring Organizations:
Australian Research Council, Canberra, ACT (Australia); Australian Inst. of Nuclear Science and Engineering, Lucas Heights, NSW (Australia)
OSTI ID:
520550
Research Organizations:
Australian Inst. of Nuclear Science and Engineering, Lucas Heights, NSW (Australia)
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97638268; TRN: AU9716170057668
Availability:
INIS; OSTI as DE97638268
Submitting Site:
AUN
Size:
pp. 85-87
Announcement Date:

Citation Formats

Stannard, W B, Johnston, P N, Walker, S R, Bubb, I F, Scott, J F, Cohen, D D, and Dytlewski, N. Elastic recoil detection analysis of ferroelectric films. Australia: N. p., 1996. Web.
Stannard, W B, Johnston, P N, Walker, S R, Bubb, I F, Scott, J F, Cohen, D D, & Dytlewski, N. Elastic recoil detection analysis of ferroelectric films. Australia.
Stannard, W B, Johnston, P N, Walker, S R, Bubb, I F, Scott, J F, Cohen, D D, and Dytlewski, N. 1996. "Elastic recoil detection analysis of ferroelectric films." Australia.
@misc{etde_520550,
title = {Elastic recoil detection analysis of ferroelectric films}
author = {Stannard, W B, Johnston, P N, Walker, S R, Bubb, I F, Scott, J F, Cohen, D D, and Dytlewski, N}
abstractNote = {There has been considerable progress in developing SrBi{sub 2}Ta{sub 2}O{sub 9} (SBT) and Ba{sub O.7}Sr{sub O.3}TiO{sub 3} (BST) ferroelectric films for use as nonvolatile memory chips and for capacitors in dynamic random access memories (DRAMs). Ferroelectric materials have a very large dielectric constant ( {approx} 1000), approximately one hundred times greater than that of silicon dioxide. Devices made from these materials have been known to experience breakdown after a repeated voltage pulsing. It has been suggested that this is related to stoichiometric changes within the material. To accurately characterise these materials Elastic Recoil Detection Analysis (ERDA) is being developed. This technique employs a high energy heavy ion beam to eject nuclei from the target and uses a time of flight and energy dispersive (ToF-E) detector telescope to detect these nuclei. The recoil nuclei carry both energy and mass information which enables the determination of separate energy spectra for individual elements or for small groups of elements In this work ERDA employing 77 MeV {sup 127}I ions has been used to analyse Strontium Bismuth Tantalate thin films at the heavy ion recoil facility at ANSTO, Lucas Heights. 9 refs., 5 figs.}
place = {Australia}
year = {1996}
month = {Dec}
}