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Mixed beams for the nuclear microprobe

Abstract

Recently the Micro-Analytical Research Centre (MARC) at Melbourne University has developed a technique to provide mixed beams of ions for a magnetically focussed nuclear microprobe. Such a mixed beam is defined as two (or more) beams of different species ions that can quickly and easily be made to have the same magnetic rigidity R{sub m} = (mE/q{sup 2}) and therefore be transported, focused and scanned the same in a magnetic nuclear microprobe. The production of mixed beams in an electrostatically focussed micro- probe have already been demonstrated. This paper will show how mixed beams can be produced on a single-ended accelerator. Indications of how to produce them on a tandem will also be given. Applications of these mixed beams in micro-lithography, scanning transmission ion microscopy (STIM) imaging and ion beam induced charge (IBIC) imaging will also be presented. 3 refs., 3 figs.
Authors:
Saint, A; Breese, M B.H.; Legge, G L.F. [1] 
  1. Melbourne Univ., Parkville, VIC (Australia). School of Physics
Publication Date:
Dec 31, 1996
Product Type:
Conference
Report Number:
INIS-AU-0003; CONF-9511295-
Reference Number:
SCA: 430200; PA: AIX-28:057144; EDB-97:119893; SN: 97001841444
Resource Relation:
Conference: 9. Australian conference on nuclear technique of analysis, Newcastle (Australia), 27-29 Nov 1995; Other Information: PBD: [1996]; Related Information: Is Part Of 9th Australian conference on nuclear techniques of analysis. Proceedings; PB: 186 p.
Subject:
43 PARTICLE ACCELERATORS; ACCELERATORS; BEAM EXTRACTION; BEAM STRIPPERS; ION MICROPROBE ANALYSIS; HELIUM IONS; HYDROGEN IONS; BEAM OPTICS; ION BEAMS; ION CHANNELING; ION MICROSCOPY; ION SOURCES
OSTI ID:
520500
Research Organizations:
Australian Inst. of Nuclear Science and Engineering, Lucas Heights, NSW (Australia)
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97638268; TRN: AU9716164057144
Availability:
INIS; OSTI as DE97638268
Submitting Site:
AUN
Size:
pp. 68-70
Announcement Date:
Sep 23, 1997

Citation Formats

Saint, A, Breese, M B.H., and Legge, G L.F. Mixed beams for the nuclear microprobe. Australia: N. p., 1996. Web.
Saint, A, Breese, M B.H., & Legge, G L.F. Mixed beams for the nuclear microprobe. Australia.
Saint, A, Breese, M B.H., and Legge, G L.F. 1996. "Mixed beams for the nuclear microprobe." Australia.
@misc{etde_520500,
title = {Mixed beams for the nuclear microprobe}
author = {Saint, A, Breese, M B.H., and Legge, G L.F.}
abstractNote = {Recently the Micro-Analytical Research Centre (MARC) at Melbourne University has developed a technique to provide mixed beams of ions for a magnetically focussed nuclear microprobe. Such a mixed beam is defined as two (or more) beams of different species ions that can quickly and easily be made to have the same magnetic rigidity R{sub m} = (mE/q{sup 2}) and therefore be transported, focused and scanned the same in a magnetic nuclear microprobe. The production of mixed beams in an electrostatically focussed micro- probe have already been demonstrated. This paper will show how mixed beams can be produced on a single-ended accelerator. Indications of how to produce them on a tandem will also be given. Applications of these mixed beams in micro-lithography, scanning transmission ion microscopy (STIM) imaging and ion beam induced charge (IBIC) imaging will also be presented. 3 refs., 3 figs.}
place = {Australia}
year = {1996}
month = {Dec}
}