Abstract
Nuclear techniques of analysis have played an important role in the study of synthetic and laser annealed diamond. These measurements have mainly used ion beam analysis with a focused MeV ion beam in a nuclear microprobe system. A variety of techniques have been employed. One of the most important is nuclear elastic scattering, sometimes called non-Rutherford scattering, which has been used to accurately characterise diamond films for thickness and composition. This is possible by the use of a database of measured scattering cross sections. Recently, this work has been extended and nuclear elastic scattering cross sections for both natural boron isotopes have been measured. For radiation damaged diamond, a focused laser annealing scheme has been developed which produces near complete regrowth of MeV phosphorus implanted diamonds. In the laser annealed regions, proton induced x-ray emission has been used to show that 50 % of the P atoms occupy lattice sites. This opens the way to produce n-type diamond for microelectronic device applications. All these analytical applications utilize a focused MeV microbeam which is ideally suited for diamond analysis. This presentation reviews these applications, as well as the technology of nuclear techniques of analysis for diamond with a focused beam. 9
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Jamieson, D N;
Prawer, S;
Gonon, P;
Walker, R;
Dooley, S;
Bettiol, A;
Pearce, J
[1]
- Melbourne Univ., Parkville, VIC (Australia). School of Physics
Citation Formats
Jamieson, D N, Prawer, S, Gonon, P, Walker, R, Dooley, S, Bettiol, A, and Pearce, J.
Nuclear techniques of analysis in diamond synthesis and annealing.
Australia: N. p.,
1996.
Web.
Jamieson, D N, Prawer, S, Gonon, P, Walker, R, Dooley, S, Bettiol, A, & Pearce, J.
Nuclear techniques of analysis in diamond synthesis and annealing.
Australia.
Jamieson, D N, Prawer, S, Gonon, P, Walker, R, Dooley, S, Bettiol, A, and Pearce, J.
1996.
"Nuclear techniques of analysis in diamond synthesis and annealing."
Australia.
@misc{etde_520466,
title = {Nuclear techniques of analysis in diamond synthesis and annealing}
author = {Jamieson, D N, Prawer, S, Gonon, P, Walker, R, Dooley, S, Bettiol, A, and Pearce, J}
abstractNote = {Nuclear techniques of analysis have played an important role in the study of synthetic and laser annealed diamond. These measurements have mainly used ion beam analysis with a focused MeV ion beam in a nuclear microprobe system. A variety of techniques have been employed. One of the most important is nuclear elastic scattering, sometimes called non-Rutherford scattering, which has been used to accurately characterise diamond films for thickness and composition. This is possible by the use of a database of measured scattering cross sections. Recently, this work has been extended and nuclear elastic scattering cross sections for both natural boron isotopes have been measured. For radiation damaged diamond, a focused laser annealing scheme has been developed which produces near complete regrowth of MeV phosphorus implanted diamonds. In the laser annealed regions, proton induced x-ray emission has been used to show that 50 % of the P atoms occupy lattice sites. This opens the way to produce n-type diamond for microelectronic device applications. All these analytical applications utilize a focused MeV microbeam which is ideally suited for diamond analysis. This presentation reviews these applications, as well as the technology of nuclear techniques of analysis for diamond with a focused beam. 9 refs., 6 figs.}
place = {Australia}
year = {1996}
month = {Dec}
}
title = {Nuclear techniques of analysis in diamond synthesis and annealing}
author = {Jamieson, D N, Prawer, S, Gonon, P, Walker, R, Dooley, S, Bettiol, A, and Pearce, J}
abstractNote = {Nuclear techniques of analysis have played an important role in the study of synthetic and laser annealed diamond. These measurements have mainly used ion beam analysis with a focused MeV ion beam in a nuclear microprobe system. A variety of techniques have been employed. One of the most important is nuclear elastic scattering, sometimes called non-Rutherford scattering, which has been used to accurately characterise diamond films for thickness and composition. This is possible by the use of a database of measured scattering cross sections. Recently, this work has been extended and nuclear elastic scattering cross sections for both natural boron isotopes have been measured. For radiation damaged diamond, a focused laser annealing scheme has been developed which produces near complete regrowth of MeV phosphorus implanted diamonds. In the laser annealed regions, proton induced x-ray emission has been used to show that 50 % of the P atoms occupy lattice sites. This opens the way to produce n-type diamond for microelectronic device applications. All these analytical applications utilize a focused MeV microbeam which is ideally suited for diamond analysis. This presentation reviews these applications, as well as the technology of nuclear techniques of analysis for diamond with a focused beam. 9 refs., 6 figs.}
place = {Australia}
year = {1996}
month = {Dec}
}