The complex of Nuclear Interaction Analysis Methods including charged particle activation analysis (CPAA and HIAA), spectrometry of ion induced gamma-emission (PIGE and HIIGE) , characteristic X-ray emission (PIXE), and Rutherford Backscattering Spectrometry (RBS), have been used for diagnostics of the High Power Ion Beam (HPIB) assisted technologies. Accelerated ion beams from the EG-2.5 electrostatic generator and U-120 cyclotron were used for implementation of the techniques. The complex allows a lot of problems of elemental and isotopic analysis to be addressed. First, it is the determination of micro- and macrocomponents of modified materials; second, determination of surface density of thin films, multilayers and coatings, total surface gaseous contamination and amounts of the elements implanted in specimens; third, measurement of concentration depth profiles of the elements. Experiments have shown that the preferable application of nuclear analysis methods allows us to avoid the considerable errors arising when the concentration depth profiles of elements are measured by SIMS or AES in studies of mass transfer processes induced by HPIBs. (author). 1 tab., 2 figs., 3 refs.