Data processing method was studied for mise-a-la-masse survey. Mise-a-la-masse method using wells as current sources measures resultant ground surface potential difference, and detects underground local resistivity anomaly. To extract resistivity anomaly largely different from surroundings, the anomaly is extracted as difference between the estimated value of regular resistivity structure (background) and potential difference or apparent resistivity. The following three approximations were attempted to estimate the background: the theoretical equation assuming isotropic homogeneous resistivity structure, that assuming horizontal multi-layered structure and the exponential function of distance from linear electrode for apparent resistivity, and these were compared with each other by numerical model experiment. The data processing method which determines the resistivity structure of the background and the residual of apparent resistivity distribution by inversion analysis using the above second equation, could precisely extract local resistivity anomaly, and estimate the depth distribution of resistivity. 5 refs., 10 figs., 2 tabs.