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Grazing incidence diffraction : A review

Abstract

Different Grazing Incidence Diffraction (GID) methods for the analysis of thin films and multilayer structures are reviewed in three sections: the reflectivity is developed in the first one, which includes the non-specular diffuse scattering. The second one is devoted to the extremely asymmetric Bragg diffraction and the third one to the in-plane Bragg diffraction. Analytical formulations of the scattered intensities are developed for each geometry, in the framework of the kinetical analysis as well as the dynamical theory. Experimental examples are given to illustrate the quantitative possibility of the GID techniques.
Authors:
Gilles, B [1] 
  1. LTPCM, ENSEEG. St. Martin d`Heres. (France)
Publication Date:
Sep 01, 1996
Product Type:
Conference
Report Number:
LNF-IR-96/049; CONF-9610291-
Reference Number:
SCA: 665300; PA: ITA-97:000425; EDB-97:064295; SN: 97001773807
Resource Relation:
Conference: 5. school on X-ray diffraction from polycrystalline materials, Frascati (Italy), 2-5 Oct 1996; Other Information: PBD: Sep 1996; Related Information: Is Part Of Thin film characterisation by advanced X-ray diffraction techniques; Cappuccio, G.; Terranova, M.L. [eds.] [INFN, Laboratori Nazionali di Frascati, Rome (Italy)]; PB: 388 p.
Subject:
66 PHYSICS; GRAZING INCIDENCE TOMOGRAPHY; X-RAY DIFFRACTION; DIAGNOSTIC TECHNIQUES; THIN FILMS; BRAGG REFLECTION; SCATTERING; CRYSTALS
OSTI ID:
465291
Research Organizations:
Istituto Nazionale di Fisica Nucleare, Frascati (Italy). Lab. Nazionale di Frascati
Country of Origin:
Italy
Language:
English
Other Identifying Numbers:
Other: ON: DE97740684; TRN: IT9700425
Availability:
OSTI as DE97740684
Submitting Site:
ITA
Size:
pp. 177-204
Announcement Date:
May 16, 1997

Citation Formats

Gilles, B. Grazing incidence diffraction : A review. Italy: N. p., 1996. Web.
Gilles, B. Grazing incidence diffraction : A review. Italy.
Gilles, B. 1996. "Grazing incidence diffraction : A review." Italy.
@misc{etde_465291,
title = {Grazing incidence diffraction : A review}
author = {Gilles, B}
abstractNote = {Different Grazing Incidence Diffraction (GID) methods for the analysis of thin films and multilayer structures are reviewed in three sections: the reflectivity is developed in the first one, which includes the non-specular diffuse scattering. The second one is devoted to the extremely asymmetric Bragg diffraction and the third one to the in-plane Bragg diffraction. Analytical formulations of the scattered intensities are developed for each geometry, in the framework of the kinetical analysis as well as the dynamical theory. Experimental examples are given to illustrate the quantitative possibility of the GID techniques.}
place = {Italy}
year = {1996}
month = {Sep}
}