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Polycrystalline thin films : A review

Abstract

Polycrystalline thin films can be described in terms of grain morphology and in terms of their packing by the Thornton`s zone model as a function of temperature of deposition and as a function of energy of deposited atoms. Grain size and preferred grain orientation (texture) can be determined by X-ray diffraction (XRD) methods. A review of XRD analytical methods of texture analysis is given with main attention paid to simple empirical functions used for texture description and for structure analysis by joint texture refinement. To illustrate the methods of detailed structure analysis of thin polycrystalline films, examples of multilayers are used with the aim to show experiments and data evaluation to determine layer thickness, periodicity, interface roughness, lattice spacing, strain and the size of diffraction coherent volumes. The methods of low angle and high angle XRD are described and discussed with respect to their complementary information content.
Authors:
Valvoda, V [1] 
  1. Charles Univ., Prague (Czech Republic). Faculty of Mathematics and Physics
Publication Date:
Sep 01, 1996
Product Type:
Conference
Report Number:
LNF-IR-96/049; CONF-9610291-
Reference Number:
SCA: 665300; PA: ITA-97:000421; EDB-97:064279; SN: 97001773803
Resource Relation:
Conference: 5. school on X-ray diffraction from polycrystalline materials, Frascati (Italy), 2-5 Oct 1996; Other Information: PBD: Sep 1996; Related Information: Is Part Of Thin film characterisation by advanced X-ray diffraction techniques; Cappuccio, G.; Terranova, M.L. [eds.] [INFN, Laboratori Nazionali di Frascati, Rome (Italy)]; PB: 388 p.
Subject:
66 PHYSICS; POLYCRYSTALS; THIN FILMS; GRAIN ORIENTATION; GRAIN SIZE; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTOMETERS; TEXTURE
OSTI ID:
465287
Research Organizations:
Istituto Nazionale di Fisica Nucleare, Frascati (Italy). Lab. Nazionale di Frascati
Country of Origin:
Italy
Language:
English
Other Identifying Numbers:
Other: ON: DE97740684; TRN: IT9700421
Availability:
OSTI as DE97740684
Submitting Site:
ITA
Size:
pp. 67-84
Announcement Date:

Citation Formats

Valvoda, V. Polycrystalline thin films : A review. Italy: N. p., 1996. Web.
Valvoda, V. Polycrystalline thin films : A review. Italy.
Valvoda, V. 1996. "Polycrystalline thin films : A review." Italy.
@misc{etde_465287,
title = {Polycrystalline thin films : A review}
author = {Valvoda, V}
abstractNote = {Polycrystalline thin films can be described in terms of grain morphology and in terms of their packing by the Thornton`s zone model as a function of temperature of deposition and as a function of energy of deposited atoms. Grain size and preferred grain orientation (texture) can be determined by X-ray diffraction (XRD) methods. A review of XRD analytical methods of texture analysis is given with main attention paid to simple empirical functions used for texture description and for structure analysis by joint texture refinement. To illustrate the methods of detailed structure analysis of thin polycrystalline films, examples of multilayers are used with the aim to show experiments and data evaluation to determine layer thickness, periodicity, interface roughness, lattice spacing, strain and the size of diffraction coherent volumes. The methods of low angle and high angle XRD are described and discussed with respect to their complementary information content.}
place = {Italy}
year = {1996}
month = {Sep}
}