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Materials contamination control in the microelectronic industry; Controle de la contamination des materiaux dans l`industrie de la micro-electronique

Abstract

This paper deals with many aspects of the contamination of materials in the microelectronic industry. The contamination`s control of chemicals, process gases, silicon and the survey of the ions free water`s purity are treated. (TEC). 29 figs., 7 tabs.
Authors:
Publication Date:
Dec 31, 1993
Product Type:
Conference
Report Number:
CEA-CONF-12138; CONF-9312130-
Reference Number:
SCA: 540320; 440101; PA: AIX-28:030014; EDB-97:057449; NTS-97:012036; SN: 97001764864
Resource Relation:
Conference: ASPEC training seminars, Formations ASPEC, Grenoble (France), 15 Dec 1993; Other Information: PBD: 1993
Subject:
54 ENVIRONMENTAL SCIENCES; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; WATER POLLUTION CONTROL; ABSORPTION SPECTROSCOPY; MASS SPECTROSCOPY; X-RAY FLUORESCENCE ANALYSIS; MEETINGS; BACTERIA; ELECTRICAL PROPERTIES; GASES; IMPURITIES; IRON; MASERS; MICROWAVE SPECTRA; QUALITY ASSURANCE; SILICON; WATER POLLUTION; LEADING ABSTRACT
OSTI ID:
458021
Research Organizations:
CEA Centre d`Etudes de Grenoble, 38 (France). Lab. d`Electronique et d`Instrumentation
Country of Origin:
France
Language:
French
Other Identifying Numbers:
Other: ON: DE97620378; TRN: FR9601344030014
Availability:
INIS; OSTI as DE97620378
Submitting Site:
FRN
Size:
46 p.
Announcement Date:

Citation Formats

Tardif, F. Materials contamination control in the microelectronic industry; Controle de la contamination des materiaux dans l`industrie de la micro-electronique. France: N. p., 1993. Web.
Tardif, F. Materials contamination control in the microelectronic industry; Controle de la contamination des materiaux dans l`industrie de la micro-electronique. France.
Tardif, F. 1993. "Materials contamination control in the microelectronic industry; Controle de la contamination des materiaux dans l`industrie de la micro-electronique." France.
@misc{etde_458021,
title = {Materials contamination control in the microelectronic industry; Controle de la contamination des materiaux dans l`industrie de la micro-electronique}
author = {Tardif, F}
abstractNote = {This paper deals with many aspects of the contamination of materials in the microelectronic industry. The contamination`s control of chemicals, process gases, silicon and the survey of the ions free water`s purity are treated. (TEC). 29 figs., 7 tabs.}
place = {France}
year = {1993}
month = {Dec}
}