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Ion beam analysis of metal ion implanted surfaces

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Abstract

Ion implantation is an established method for altering the surface properties of many materials. While a variety of analytical techniques are available for the characterisation of implanted surfaces, those based on particle accelerators such as Rutherford backscattering (RBS) and nuclear reaction analysis (NRA) provide some of the most useful and powerful for this purpose. Application of the latter techniques to metal ion implantation research at ANSTO will be described with particular reference to specific examples from recent studies. Where possible, the information obtained from ion beam analysis will be compared with that derived from other techniques such as Energy Dispersive X-ray (EDX) and Auger spectroscopies. 4 refs., 5 figs.
Authors:
Evans, P J; Chu, J W; Johnson, E P; Noorman, J T; [1]  Sood, D K [2] 
  1. Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
  2. Royal Melbourne Inst. of Tech., VIC (Australia)
Publication Date:
Dec 31, 1993
Product Type:
Miscellaneous
Report Number:
INIS-mf-15527; CONF-9311143-
Reference Number:
SCA: 665300; PA: AIX-28:027248; EDB-97:046760; SN: 97001753924
Resource Relation:
Conference: 8. Australian conference on nuclear techniques of analysis, Sydney (Australia), 17-19 Nov 1993; Other Information: PBD: 1993; Related Information: Is Part Of Proceedings of the 8. Australian conference on nuclear techniques of analysis; PB: 194 p.
Subject:
66 PHYSICS; ION IMPLANTATION; ION SCATTERING ANALYSIS; NUCLEAR REACTION ANALYSIS; ALPHA PARTICLES; ALUMINIUM ALLOYS; CARBON; CHROMIUM IONS; EXPERIMENTAL DATA; HELIUM 3 REACTIONS; OXYGEN 16 TARGET; SURFACE TREATMENTS; TITANIUM IONS; TUNGSTEN IONS
Sponsoring Organizations:
Australian Inst. of Nuclear Science and Engineering, Lucas Heights, NSW (Australia)
OSTI ID:
446215
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97616714; TRN: AU9715769027248
Availability:
INIS; OSTI as DE97616714
Submitting Site:
AUN
Size:
pp. 68-71
Announcement Date:
Mar 28, 1997

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Citation Formats

Evans, P J, Chu, J W, Johnson, E P, Noorman, J T, and Sood, D K. Ion beam analysis of metal ion implanted surfaces. Australia: N. p., 1993. Web.
Evans, P J, Chu, J W, Johnson, E P, Noorman, J T, & Sood, D K. Ion beam analysis of metal ion implanted surfaces. Australia.
Evans, P J, Chu, J W, Johnson, E P, Noorman, J T, and Sood, D K. 1993. "Ion beam analysis of metal ion implanted surfaces." Australia.
@misc{etde_446215,
title = {Ion beam analysis of metal ion implanted surfaces}
 author = {Evans, P J, Chu, J W, Johnson, E P, Noorman, J T, and Sood, D K}
 abstractNote = {Ion implantation is an established method for altering the surface properties of many materials. While a variety of analytical techniques are available for the characterisation of implanted surfaces, those based on particle accelerators such as Rutherford backscattering (RBS) and nuclear reaction analysis (NRA) provide some of the most useful and powerful for this purpose. Application of the latter techniques to metal ion implantation research at ANSTO will be described with particular reference to specific examples from recent studies. Where possible, the information obtained from ion beam analysis will be compared with that derived from other techniques such as Energy Dispersive X-ray (EDX) and Auger spectroscopies. 4 refs., 5 figs.}
 place = {Australia}
 year = {1993}
 month = {Dec}
 }