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Laser sputter neutral mass spectrometry

Abstract

Laser sputter neutral mass spectrometry (LSNMS) is an emerging technique for highly sensitive surface analysis. In this technique a target is bombarded with a pulsed beam of keV ions. The sputtered particles are intercepted by a high intensity pulsed laser beam above the surface and ionised with almost 100% efficiency. The photions may then be mass analysed using a quadrupole or, more commonly, using time of flight (TOF) techniques. In this method photoions are extracted from the ionisation region, accelerated to a known energy E{sub o} and strike a channelplate detector a distance `d` away. The flight time `t` of the photoions is then related to their mass by `d` {radical}m / {radical} 2E{sub o} so measurement of `t` allows mass spectra to be obtained. It is found that LSNMS is an emerging technique of great sensitivity and flexibility, useful for both applied analysis and to investigate basic sputtering processes. 4 refs., 3 figs.
Authors:
King, B V; Clarke, M; Hu, H; Betz, [1] 
  1. Newcastle Univ., NSW (Australia). Dept. of Physics
Publication Date:
Dec 31, 1993
Product Type:
Miscellaneous
Report Number:
INIS-mf-15527; CONF-9311143-
Reference Number:
SCA: 665300; PA: AIX-28:027242; EDB-97:046759; SN: 97001753918
Resource Relation:
Conference: 8. Australian conference on nuclear techniques of analysis, Sydney (Australia), 17-19 Nov 1993; Other Information: PBD: 1993; Related Information: Is Part Of Proceedings of the 8. Australian conference on nuclear techniques of analysis; PB: 194 p.
Subject:
66 PHYSICS; MASS SPECTROSCOPY; LASER RADIATION; PULSED IRRADIATION; ZIRCONIUM; ENERGY SPECTRA; EXPERIMENTAL DATA; PHOTOIONIZATION; PHOTON BEAMS; SPUTTERING; TIME-OF-FLIGHT METHOD
OSTI ID:
446209
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97616714; TRN: AU9715759027242
Availability:
INIS; OSTI as DE97616714
Submitting Site:
AUN
Size:
pp. 43-45
Announcement Date:

Citation Formats

King, B V, Clarke, M, Hu, H, and Betz,. Laser sputter neutral mass spectrometry. Australia: N. p., 1993. Web.
King, B V, Clarke, M, Hu, H, & Betz,. Laser sputter neutral mass spectrometry. Australia.
King, B V, Clarke, M, Hu, H, and Betz,. 1993. "Laser sputter neutral mass spectrometry." Australia.
@misc{etde_446209,
title = {Laser sputter neutral mass spectrometry}
author = {King, B V, Clarke, M, Hu, H, and Betz,}
abstractNote = {Laser sputter neutral mass spectrometry (LSNMS) is an emerging technique for highly sensitive surface analysis. In this technique a target is bombarded with a pulsed beam of keV ions. The sputtered particles are intercepted by a high intensity pulsed laser beam above the surface and ionised with almost 100% efficiency. The photions may then be mass analysed using a quadrupole or, more commonly, using time of flight (TOF) techniques. In this method photoions are extracted from the ionisation region, accelerated to a known energy E{sub o} and strike a channelplate detector a distance `d` away. The flight time `t` of the photoions is then related to their mass by `d` {radical}m / {radical} 2E{sub o} so measurement of `t` allows mass spectra to be obtained. It is found that LSNMS is an emerging technique of great sensitivity and flexibility, useful for both applied analysis and to investigate basic sputtering processes. 4 refs., 3 figs.}
place = {Australia}
year = {1993}
month = {Dec}
}