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Advances of the IBIC technique

Abstract

The ion beam induced charge (IBIC) technique has been used for a wide variety of analytical applications in the study of semiconductor materials. This paper briefly reviews these uses and identifies those areas which require further development in order to facilitate the more widespread use of the IBIC method. Progress towards implementing these improvements is discussed. 14 refs., 1 fig.
Authors:
Breese, M B.H.; Laird, J S; Jamieson, D N [1] 
  1. Melbourne Univ., Parkville, VIC (Australia). School of Physics
Publication Date:
Dec 31, 1993
Product Type:
Conference
Report Number:
INIS-mf-15527; CONF-9311143-
Reference Number:
SCA: 665100; 665300; PA: AIX-28:027230; EDB-97:046726; SN: 97001753909
Resource Relation:
Conference: 8. Australian conference on nuclear techniques of analysis, Sydney (Australia), 17-19 Nov 1993; Other Information: PBD: 1993; Related Information: Is Part Of Proceedings of the 8. Australian conference on nuclear techniques of analysis; PB: 194 p.
Subject:
66 PHYSICS; MICROANALYSIS; CHARGE COLLECTION; ION BEAMS; SPATIAL RESOLUTION; SEMICONDUCTOR MATERIALS; ION MICROPROBE ANALYSIS; MEASURING METHODS; PHYSICAL RADIATION EFFECTS; SIGNAL-TO-NOISE RATIO
OSTI ID:
446203
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97616714; TRN: AU9715807027230
Availability:
INIS; OSTI as DE97616714
Submitting Site:
AUN
Size:
pp. 175-177
Announcement Date:
Mar 28, 1997

Citation Formats

Breese, M B.H., Laird, J S, and Jamieson, D N. Advances of the IBIC technique. Australia: N. p., 1993. Web.
Breese, M B.H., Laird, J S, & Jamieson, D N. Advances of the IBIC technique. Australia.
Breese, M B.H., Laird, J S, and Jamieson, D N. 1993. "Advances of the IBIC technique." Australia.
@misc{etde_446203,
title = {Advances of the IBIC technique}
author = {Breese, M B.H., Laird, J S, and Jamieson, D N}
abstractNote = {The ion beam induced charge (IBIC) technique has been used for a wide variety of analytical applications in the study of semiconductor materials. This paper briefly reviews these uses and identifies those areas which require further development in order to facilitate the more widespread use of the IBIC method. Progress towards implementing these improvements is discussed. 14 refs., 1 fig.}
place = {Australia}
year = {1993}
month = {Dec}
}