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Scanning deep level transient spectroscopy using an MeV ion microprobe

Abstract

Traditionally the scanning ion microprobe has given little or no information regarding the electronic structure of materials in particular semiconductors. A new imaging technique called Scanning Ion Deep Level Transient Spectroscopy (SIDLTS) is presented which is able to spatially map alterations in the band gap structure of materials by lattice defects or impurities. 3 refs., 2 figs.
Authors:
Laird, J S; Bardos, R A; Saint, A; Moloney, G M; Legge, G F.J. [1] 
  1. Melbourne Univ., Parkville, VIC (Australia)
Publication Date:
Dec 31, 1993
Product Type:
Miscellaneous
Report Number:
INIS-mf-15527; CONF-9311143-
Reference Number:
SCA: 665100; 360602; PA: AIX-28:027225; EDB-97:046717; SN: 97001753904
Resource Relation:
Conference: 8. Australian conference on nuclear techniques of analysis, Sydney (Australia), 17-19 Nov 1993; Other Information: PBD: 1993; Related Information: Is Part Of Proceedings of the 8. Australian conference on nuclear techniques of analysis; PB: 194 p.
Subject:
66 PHYSICS; 36 MATERIALS SCIENCE; ELECTRONIC STRUCTURE; ION MICROPROBE ANALYSIS; ION SPECTROSCOPY; SEMICONDUCTOR MATERIALS; CRYSTAL DEFECTS; CROSS SECTIONS; EXPERIMENTAL DATA; HELIUM IONS; MEV RANGE 01-10; PHYSICAL RADIATION EFFECTS; TEMPERATURE DEPENDENCE; TRAPS
OSTI ID:
446197
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97616714; TRN: AU9715790027225
Availability:
INIS; OSTI as DE97616714
Submitting Site:
AUN
Size:
pp. 127-129
Announcement Date:
Mar 28, 1997

Citation Formats

Laird, J S, Bardos, R A, Saint, A, Moloney, G M, and Legge, G F.J. Scanning deep level transient spectroscopy using an MeV ion microprobe. Australia: N. p., 1993. Web.
Laird, J S, Bardos, R A, Saint, A, Moloney, G M, & Legge, G F.J. Scanning deep level transient spectroscopy using an MeV ion microprobe. Australia.
Laird, J S, Bardos, R A, Saint, A, Moloney, G M, and Legge, G F.J. 1993. "Scanning deep level transient spectroscopy using an MeV ion microprobe." Australia.
@misc{etde_446197,
title = {Scanning deep level transient spectroscopy using an MeV ion microprobe}
author = {Laird, J S, Bardos, R A, Saint, A, Moloney, G M, and Legge, G F.J.}
abstractNote = {Traditionally the scanning ion microprobe has given little or no information regarding the electronic structure of materials in particular semiconductors. A new imaging technique called Scanning Ion Deep Level Transient Spectroscopy (SIDLTS) is presented which is able to spatially map alterations in the band gap structure of materials by lattice defects or impurities. 3 refs., 2 figs.}
place = {Australia}
year = {1993}
month = {Dec}
}