Abstract
In recent years, the use of heavy ion time-of-flight elastic recoil spectrometry (HIERDA) has been applied to analyse multi-phase, thin layer devices used in optoelectronics, semiconductors and solar power generation. HIERDA gives simultaneously, mass resolved elemental concentration vs depth profiles of the matrix constituents, and is particularly suited to the determination of light elements in a heavy matrix. The beam/target interaction process is similar to RBS, but has the difference that the recoiling target atoms are detected instead of the scattered projectile. High energy, heavy ions beams bombard the sample, ejecting recoil atoms which are detected at a forward angle of 45 deg. A time-of-flight and total energy detection system enables the ejected particle`s mass to be identified, and allows energy spectra to be obtained and interpreted in an analogous way to RBS, but with the important difference that the elemental spectra are separated, and not superimposed on a background as in RBS. Some of the measurements made with a HIERDA system on the ANTARES Tandem Accelerator at ANSTO are described. 1 refs., 4 figs.
Dytlewski, N;
Cohen, D D;
[1]
Johnston, P;
Walker, S;
[2]
Whitlow, H;
Hult, M;
[3]
Oestling, M;
Zaring, C
[4]
- Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
- Royal Melbourne Inst. of Tech., VIC (Australia)
- Lund Univ. (Sweden)
- Royal Inst. of Tech., Stockholm (Sweden)
Citation Formats
Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C.
Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices.
Australia: N. p.,
1993.
Web.
Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, & Zaring, C.
Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices.
Australia.
Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C.
1993.
"Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices."
Australia.
@misc{etde_446195,
title = {Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices}
author = {Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C}
abstractNote = {In recent years, the use of heavy ion time-of-flight elastic recoil spectrometry (HIERDA) has been applied to analyse multi-phase, thin layer devices used in optoelectronics, semiconductors and solar power generation. HIERDA gives simultaneously, mass resolved elemental concentration vs depth profiles of the matrix constituents, and is particularly suited to the determination of light elements in a heavy matrix. The beam/target interaction process is similar to RBS, but has the difference that the recoiling target atoms are detected instead of the scattered projectile. High energy, heavy ions beams bombard the sample, ejecting recoil atoms which are detected at a forward angle of 45 deg. A time-of-flight and total energy detection system enables the ejected particle`s mass to be identified, and allows energy spectra to be obtained and interpreted in an analogous way to RBS, but with the important difference that the elemental spectra are separated, and not superimposed on a background as in RBS. Some of the measurements made with a HIERDA system on the ANTARES Tandem Accelerator at ANSTO are described. 1 refs., 4 figs.}
place = {Australia}
year = {1993}
month = {Dec}
}
title = {Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices}
author = {Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C}
abstractNote = {In recent years, the use of heavy ion time-of-flight elastic recoil spectrometry (HIERDA) has been applied to analyse multi-phase, thin layer devices used in optoelectronics, semiconductors and solar power generation. HIERDA gives simultaneously, mass resolved elemental concentration vs depth profiles of the matrix constituents, and is particularly suited to the determination of light elements in a heavy matrix. The beam/target interaction process is similar to RBS, but has the difference that the recoiling target atoms are detected instead of the scattered projectile. High energy, heavy ions beams bombard the sample, ejecting recoil atoms which are detected at a forward angle of 45 deg. A time-of-flight and total energy detection system enables the ejected particle`s mass to be identified, and allows energy spectra to be obtained and interpreted in an analogous way to RBS, but with the important difference that the elemental spectra are separated, and not superimposed on a background as in RBS. Some of the measurements made with a HIERDA system on the ANTARES Tandem Accelerator at ANSTO are described. 1 refs., 4 figs.}
place = {Australia}
year = {1993}
month = {Dec}
}