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Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices

Abstract

In recent years, the use of heavy ion time-of-flight elastic recoil spectrometry (HIERDA) has been applied to analyse multi-phase, thin layer devices used in optoelectronics, semiconductors and solar power generation. HIERDA gives simultaneously, mass resolved elemental concentration vs depth profiles of the matrix constituents, and is particularly suited to the determination of light elements in a heavy matrix. The beam/target interaction process is similar to RBS, but has the difference that the recoiling target atoms are detected instead of the scattered projectile. High energy, heavy ions beams bombard the sample, ejecting recoil atoms which are detected at a forward angle of 45 deg. A time-of-flight and total energy detection system enables the ejected particle`s mass to be identified, and allows energy spectra to be obtained and interpreted in an analogous way to RBS, but with the important difference that the elemental spectra are separated, and not superimposed on a background as in RBS. Some of the measurements made with a HIERDA system on the ANTARES Tandem Accelerator at ANSTO are described. 1 refs., 4 figs.
Authors:
Dytlewski, N; Cohen, D D; [1]  Johnston, P; Walker, S; [2]  Whitlow, H; Hult, M; [3]  Oestling, M; Zaring, C [4] 
  1. Australian Nuclear Science and Technology Organisation, Lucas Heights, NSW (Australia)
  2. Royal Melbourne Inst. of Tech., VIC (Australia)
  3. Lund Univ. (Sweden)
  4. Royal Inst. of Tech., Stockholm (Sweden)
Publication Date:
Dec 31, 1993
Product Type:
Miscellaneous
Report Number:
INIS-mf-15527; CONF-9311143-
Reference Number:
SCA: 665100; 665300; 360602; PA: AIX-28:027223; EDB-97:046727; SN: 97001753902
Resource Relation:
Conference: 8. Australian conference on nuclear techniques of analysis, Sydney (Australia), 17-19 Nov 1993; Other Information: PBD: 1993; Related Information: Is Part Of Proceedings of the 8. Australian conference on nuclear techniques of analysis; PB: 194 p.
Subject:
66 PHYSICS; 36 MATERIALS SCIENCE; COBALT SILICIDES; ION SCATTERING ANALYSIS; ION IMPLANTATION; SEMICONDUCTOR DEVICES; BORON IONS; ELASTIC SCATTERING; ENERGY SPECTRA; EXPERIMENTAL DATA; HEAVY IONS; IODINE 127 BEAMS; MASS RESOLUTION; RECOILS; SPATIAL DISTRIBUTION; TIME-OF-FLIGHT METHOD
OSTI ID:
446195
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE97616714; TRN: AU9715777027223
Availability:
INIS; OSTI as DE97616714
Submitting Site:
AUN
Size:
pp. 95-97
Announcement Date:
Mar 28, 1997

Citation Formats

Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C. Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices. Australia: N. p., 1993. Web.
Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, & Zaring, C. Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices. Australia.
Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C. 1993. "Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices." Australia.
@misc{etde_446195,
title = {Heavy ion elastic recoil detection analysis of optoelectronic and semiconductor devices}
author = {Dytlewski, N, Cohen, D D, Johnston, P, Walker, S, Whitlow, H, Hult, M, Oestling, M, and Zaring, C}
abstractNote = {In recent years, the use of heavy ion time-of-flight elastic recoil spectrometry (HIERDA) has been applied to analyse multi-phase, thin layer devices used in optoelectronics, semiconductors and solar power generation. HIERDA gives simultaneously, mass resolved elemental concentration vs depth profiles of the matrix constituents, and is particularly suited to the determination of light elements in a heavy matrix. The beam/target interaction process is similar to RBS, but has the difference that the recoiling target atoms are detected instead of the scattered projectile. High energy, heavy ions beams bombard the sample, ejecting recoil atoms which are detected at a forward angle of 45 deg. A time-of-flight and total energy detection system enables the ejected particle`s mass to be identified, and allows energy spectra to be obtained and interpreted in an analogous way to RBS, but with the important difference that the elemental spectra are separated, and not superimposed on a background as in RBS. Some of the measurements made with a HIERDA system on the ANTARES Tandem Accelerator at ANSTO are described. 1 refs., 4 figs.}
place = {Australia}
year = {1993}
month = {Dec}
}