This paper reports the study results on manufacturing technologies for low-cost high-quality Si substrates in fiscal 1994. (1) On the 220mm square type electromagnetic casting technology, development of fast stable casting technology was studied using the previously installed 220mm square type electromagnetic casting furnace. As a result, continuous stable casting was achieved at high casting speed up to 3.0mm/min. Any degradation of crystalline quality due to high speed casting was not found. (2) On the 350mm square type electromagnetic casting furnace, oscillation circuit constants were analyzed for design of the power source for No.4 electromagnetic casting furnace. In graphite heating experiment using the 350mm square type water-cooling copper crucible heated by 1000kW high-frequency power source, sufficient heat quantity was obtained for initial melting of Si. Any problems in Si melting were not found through Al block melting test. 6 figs.
Tatsuta, M 
- New Energy and Industrial Technology Development Organization, Tokyo (Japan)