Abstract
To determine self-consistently the time evolution of particle size and their number density in situ multi-angle polarization laser light scattering was used. Cross-polarization intensities (incident and scattered light intensities with opposite polarization) measured at 135{sup o} and ex-situ TEM analysis demonstrate the existence of non-spherical agglomerates during the early phase of agglomeration. Later in the particle time development both techniques reveal spherical particles again. The presence of strong cross-polarization intensities is accompanied by low frequency instabilities detected on the scattered light intensities and plasma emission. It is found that the particle radius and particle number density during the agglomeration phase can be well described by the Brownian Free Molecule Coagulation model. Application of this neutral particle coagulation model is justified by calculation of the particle charge whereby it is shown that particles of a few tens of nanometer can be considered as neutral under our experimental conditions. The measured particle dispersion can be well described by a Brownian Free Molecule Coagulation model including a log-normal particle size distribution. (author) 11 figs., 48 refs.
Courteille, C;
Hollenstein, C;
Dorier, J L;
Gay, P;
Schwarzenbach, W;
Howling, A A;
[1]
Bertran, E;
Viera, G;
[2]
Martins, R;
Macarico, A
[3]
- Ecole Polytechnique Federale, Lausanne (Switzerland). Centre de Recherche en Physique des Plasma (CRPP)
- Barcelona Univ., Dep. de de Fisica Aplicada I Electronica, Barcelona (Spain)
- FCTUNL, Materials Science Dep., Monte de Caparica (Portugal)
Citation Formats
Courteille, C, Hollenstein, C, Dorier, J L, Gay, P, Schwarzenbach, W, Howling, A A, Bertran, E, Viera, G, Martins, R, and Macarico, A.
Powder agglomeration study in RF silane plasmas by in situ polarization-sensitive laser light scattering and TEM measurements.
Switzerland: N. p.,
1966.
Web.
Courteille, C, Hollenstein, C, Dorier, J L, Gay, P, Schwarzenbach, W, Howling, A A, Bertran, E, Viera, G, Martins, R, & Macarico, A.
Powder agglomeration study in RF silane plasmas by in situ polarization-sensitive laser light scattering and TEM measurements.
Switzerland.
Courteille, C, Hollenstein, C, Dorier, J L, Gay, P, Schwarzenbach, W, Howling, A A, Bertran, E, Viera, G, Martins, R, and Macarico, A.
1966.
"Powder agglomeration study in RF silane plasmas by in situ polarization-sensitive laser light scattering and TEM measurements."
Switzerland.
@misc{etde_262385,
title = {Powder agglomeration study in RF silane plasmas by in situ polarization-sensitive laser light scattering and TEM measurements}
author = {Courteille, C, Hollenstein, C, Dorier, J L, Gay, P, Schwarzenbach, W, Howling, A A, Bertran, E, Viera, G, Martins, R, and Macarico, A}
abstractNote = {To determine self-consistently the time evolution of particle size and their number density in situ multi-angle polarization laser light scattering was used. Cross-polarization intensities (incident and scattered light intensities with opposite polarization) measured at 135{sup o} and ex-situ TEM analysis demonstrate the existence of non-spherical agglomerates during the early phase of agglomeration. Later in the particle time development both techniques reveal spherical particles again. The presence of strong cross-polarization intensities is accompanied by low frequency instabilities detected on the scattered light intensities and plasma emission. It is found that the particle radius and particle number density during the agglomeration phase can be well described by the Brownian Free Molecule Coagulation model. Application of this neutral particle coagulation model is justified by calculation of the particle charge whereby it is shown that particles of a few tens of nanometer can be considered as neutral under our experimental conditions. The measured particle dispersion can be well described by a Brownian Free Molecule Coagulation model including a log-normal particle size distribution. (author) 11 figs., 48 refs.}
place = {Switzerland}
year = {1966}
month = {Mar}
}
title = {Powder agglomeration study in RF silane plasmas by in situ polarization-sensitive laser light scattering and TEM measurements}
author = {Courteille, C, Hollenstein, C, Dorier, J L, Gay, P, Schwarzenbach, W, Howling, A A, Bertran, E, Viera, G, Martins, R, and Macarico, A}
abstractNote = {To determine self-consistently the time evolution of particle size and their number density in situ multi-angle polarization laser light scattering was used. Cross-polarization intensities (incident and scattered light intensities with opposite polarization) measured at 135{sup o} and ex-situ TEM analysis demonstrate the existence of non-spherical agglomerates during the early phase of agglomeration. Later in the particle time development both techniques reveal spherical particles again. The presence of strong cross-polarization intensities is accompanied by low frequency instabilities detected on the scattered light intensities and plasma emission. It is found that the particle radius and particle number density during the agglomeration phase can be well described by the Brownian Free Molecule Coagulation model. Application of this neutral particle coagulation model is justified by calculation of the particle charge whereby it is shown that particles of a few tens of nanometer can be considered as neutral under our experimental conditions. The measured particle dispersion can be well described by a Brownian Free Molecule Coagulation model including a log-normal particle size distribution. (author) 11 figs., 48 refs.}
place = {Switzerland}
year = {1966}
month = {Mar}
}