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Solid-state dewetting of ultra-thin Au films on SiO{sub 2} and HfO{sub 2}

Abstract

Ultra-thin Au films with thickness (h) ranging from 0.5 to 6.0 nm were deposited at room temperature (RT) by means of e-beam evaporation on SiO{sub 2} and HfO{sub 2}. Due to the natural solid-state dewetting (SSD) of the as-deposited films, Au nanoparticles (NPs) were formed on the substrates. By properly adjusting the h value, the size and the density of the Au NPs can be finely tuned. For h = 0.5 nm, spherical-like Au NPs with diameter below 5 nm and density in the order of 10{sup 12} Au NPs cm{sup −2} were obtained without any additional thermal treatment independently from the substrate. The dependence of the Au NPs characteristics on the substrate starts to be effective for h ≥ 1.0 nm where the Au NPs diameter is in the 5–10 nm range and the density is around 10{sup 11} Au NPs cm{sup −2}. The effect of a subsequent high temperature (400–800 °C) annealing in N{sub 2} atmosphere on the Au NPs was investigated as well. For h ≤ 1.0 nm, the Au NPs characteristics evidenced an excellent thermal stability. Whereas the thermal treatment affects the cristallinity of the Au NPs. For the thicker films (2.0 ≤ h ≤ 6.0 nm), the thermal treatment becomes effective to induce the SSD.  More>>
Authors:
Seguini, G; Llamoja Curi, J; Spiga, S; Tallarida, G; Wiemer, C; Perego, M [1] 
  1. Laboratorio MDM, IMM-CNR, Via C Olivetti 2, I-20864 Agrate Brianza (MB) (Italy)
Publication Date:
Dec 12, 2014
Product Type:
Journal Article
Resource Relation:
Journal Name: Nanotechnology; Journal Volume: 25; Journal Issue: 49; Other Information: Country of input: International Atomic Energy Agency (IAEA)
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; ANNEALING; DENSITY; ELECTRON BEAMS; FILMS; HAFNIUM OXIDES; NANOPARTICLES; SILICON OXIDES; SOLIDS; SUBSTRATES; TEMPERATURE RANGE 0273-0400 K; THICKNESS
OSTI ID:
22471098
Country of Origin:
United Kingdom
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0957-4484; TRN: GB15O7799040911
Availability:
Available from http://dx.doi.org/10.1088/0957-4484/25/49/495603
Submitting Site:
INIS
Size:
[10 page(s)]
Announcement Date:
May 09, 2016

Citation Formats

Seguini, G, Llamoja Curi, J, Spiga, S, Tallarida, G, Wiemer, C, and Perego, M. Solid-state dewetting of ultra-thin Au films on SiO{sub 2} and HfO{sub 2}. United Kingdom: N. p., 2014. Web. doi:10.1088/0957-4484/25/49/495603.
Seguini, G, Llamoja Curi, J, Spiga, S, Tallarida, G, Wiemer, C, & Perego, M. Solid-state dewetting of ultra-thin Au films on SiO{sub 2} and HfO{sub 2}. United Kingdom. https://doi.org/10.1088/0957-4484/25/49/495603
Seguini, G, Llamoja Curi, J, Spiga, S, Tallarida, G, Wiemer, C, and Perego, M. 2014. "Solid-state dewetting of ultra-thin Au films on SiO{sub 2} and HfO{sub 2}." United Kingdom. https://doi.org/10.1088/0957-4484/25/49/495603.
@misc{etde_22471098,
title = {Solid-state dewetting of ultra-thin Au films on SiO{sub 2} and HfO{sub 2}}
author = {Seguini, G, Llamoja Curi, J, Spiga, S, Tallarida, G, Wiemer, C, and Perego, M}
abstractNote = {Ultra-thin Au films with thickness (h) ranging from 0.5 to 6.0 nm were deposited at room temperature (RT) by means of e-beam evaporation on SiO{sub 2} and HfO{sub 2}. Due to the natural solid-state dewetting (SSD) of the as-deposited films, Au nanoparticles (NPs) were formed on the substrates. By properly adjusting the h value, the size and the density of the Au NPs can be finely tuned. For h = 0.5 nm, spherical-like Au NPs with diameter below 5 nm and density in the order of 10{sup 12} Au NPs cm{sup −2} were obtained without any additional thermal treatment independently from the substrate. The dependence of the Au NPs characteristics on the substrate starts to be effective for h ≥ 1.0 nm where the Au NPs diameter is in the 5–10 nm range and the density is around 10{sup 11} Au NPs cm{sup −2}. The effect of a subsequent high temperature (400–800 °C) annealing in N{sub 2} atmosphere on the Au NPs was investigated as well. For h ≤ 1.0 nm, the Au NPs characteristics evidenced an excellent thermal stability. Whereas the thermal treatment affects the cristallinity of the Au NPs. For the thicker films (2.0 ≤ h ≤ 6.0 nm), the thermal treatment becomes effective to induce the SSD. The proposed methodology can be exploited for the synthesis of Au NPs with diameter below 10 nm on different substrates at RT. (paper)}
doi = {10.1088/0957-4484/25/49/495603}
journal = {Nanotechnology}
issue = {49}
volume = {25}
journal type = {AC}
place = {United Kingdom}
year = {2014}
month = {Dec}
}