You need JavaScript to view this

Amplitude saturation of MEMS resonators explained by autoparametric resonance

Abstract

This paper describes a phenomenon that limits the power handling of MEMS resonators. It is observed that above a certain driving level, the resonance amplitude becomes independent of the driving level. In contrast to previous studies of power handling of MEMS resonators, it is found that this amplitude saturation cannot be explained by nonlinear terms in the spring constant or electrostatic force. Instead we show that the amplitude in our experiments is limited by nonlinear terms in the equation of motion which couple the in-plane length-extensional resonance mode to one or more out-of-plane (OOP) bending modes. We present experimental evidence for the autoparametric excitation of these OOP modes using a vibrometer. The measurements are compared to a model that can be used to predict a power-handling limit for MEMS resonators.
Authors:
Van der Avoort, C; Bontemps, J J M; Steeneken, P G; Le Phan, K; Van Beek, J T M; [1]  Van der Hout, R; Hulshof, J; [2]  Fey, R H B, E-mail: cas.van.der.avoort@nxp.com [3] 
  1. NXP Research, Eindhoven (Netherlands)
  2. Department of Mathematics, VU University—Faculty of Sciences, De Boelelaan 1081a, 1081 HV Amsterdam (Netherlands)
  3. Department of Mechanical Engineering, Eindhoven University of Technology, PO Box 513, 5600 MB, Eindhoven (Netherlands)
Publication Date:
Oct 15, 2010
Product Type:
Journal Article
Resource Relation:
Journal Name: Journal of Micromechanics and Microengineering. Structures, Devices and Systems; Journal Volume: 20; Journal Issue: 10; Other Information: Country of input: International Atomic Energy Agency (IAEA)
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMPLITUDES; EQUATIONS OF MOTION; MEMS; NONLINEAR PROBLEMS; RESONANCE; RESONATORS
OSTI ID:
22307041
Country of Origin:
United Kingdom
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0960-1317; CODEN: JMMIEZ; Other: PII: S0960-1317(10)60079-4; TRN: GB13H4209013214
Availability:
Available from http://dx.doi.org/10.1088/0960-1317/20/10/105012
Submitting Site:
INIS
Size:
[15 page(s)]
Announcement Date:
Feb 26, 2015

Citation Formats

Van der Avoort, C, Bontemps, J J M, Steeneken, P G, Le Phan, K, Van Beek, J T M, Van der Hout, R, Hulshof, J, and Fey, R H B, E-mail: cas.van.der.avoort@nxp.com. Amplitude saturation of MEMS resonators explained by autoparametric resonance. United Kingdom: N. p., 2010. Web. doi:10.1088/0960-1317/20/10/105012.
Van der Avoort, C, Bontemps, J J M, Steeneken, P G, Le Phan, K, Van Beek, J T M, Van der Hout, R, Hulshof, J, & Fey, R H B, E-mail: cas.van.der.avoort@nxp.com. Amplitude saturation of MEMS resonators explained by autoparametric resonance. United Kingdom. doi:10.1088/0960-1317/20/10/105012.
Van der Avoort, C, Bontemps, J J M, Steeneken, P G, Le Phan, K, Van Beek, J T M, Van der Hout, R, Hulshof, J, and Fey, R H B, E-mail: cas.van.der.avoort@nxp.com. 2010. "Amplitude saturation of MEMS resonators explained by autoparametric resonance." United Kingdom. doi:10.1088/0960-1317/20/10/105012. https://www.osti.gov/servlets/purl/10.1088/0960-1317/20/10/105012.
@misc{etde_22307041,
title = {Amplitude saturation of MEMS resonators explained by autoparametric resonance}
author = {Van der Avoort, C, Bontemps, J J M, Steeneken, P G, Le Phan, K, Van Beek, J T M, Van der Hout, R, Hulshof, J, and Fey, R H B, E-mail: cas.van.der.avoort@nxp.com}
abstractNote = {This paper describes a phenomenon that limits the power handling of MEMS resonators. It is observed that above a certain driving level, the resonance amplitude becomes independent of the driving level. In contrast to previous studies of power handling of MEMS resonators, it is found that this amplitude saturation cannot be explained by nonlinear terms in the spring constant or electrostatic force. Instead we show that the amplitude in our experiments is limited by nonlinear terms in the equation of motion which couple the in-plane length-extensional resonance mode to one or more out-of-plane (OOP) bending modes. We present experimental evidence for the autoparametric excitation of these OOP modes using a vibrometer. The measurements are compared to a model that can be used to predict a power-handling limit for MEMS resonators.}
doi = {10.1088/0960-1317/20/10/105012}
journal = {Journal of Micromechanics and Microengineering. Structures, Devices and Systems}
issue = {10}
volume = {20}
journal type = {AC}
place = {United Kingdom}
year = {2010}
month = {Oct}
}