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Construction of simple quartz crystal microbalance

Abstract

A very simple Quartz Crystal Microbalance (QCM) was constructed for the measurement of thickness of chemically deposited thin films. QCM consisted of two active elements: one dual-gate MOSFET and one bipolar transistor, and as usually two AT-cut quartz crystal. The beat frequency oscillation generated as a result of loading of the sensor crystal by the deposited thin film, was measured by HP-multimeter, set as a low frequency meter. The sensitivity was found to be high and satisfactory for the study of growth rate of thin films, mainly deposited by methods of chemical deposition.
Authors:
Ristov, Milcho; [1]  Mitrevski, Mitre [2] 
  1. Center of Energy, Informatics and Materials of the Macedonian Academy fo Science and Arts, Skopje (Macedonia, The Former Yugoslav Republic of)
  2. Institute of Physics, Faculty of natural Science and Mathematics, Ss Cyril and Methodius University, Skopje (Macedonia, The Former Yugoslav Republic of)
Publication Date:
Jul 01, 2003
Product Type:
Journal Article
Resource Relation:
Journal Name: Prilozi - Makedonska Akademija na Naukite i Umetnostite. Oddelenie na Matematicko-Tehnichki Nauki; Journal Volume: 23-24; Other Information: 2002-2003. 7 refs.,4 figs.; UDC:539.23:681.2
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CRYSTALS; DEPOSITION; MICROBALANCES; MOSFET; OSCILLATORS; QUARTZ; THIN FILMS; TRANSISTORS; BALANCES; ELECTRONIC EQUIPMENT; EQUIPMENT; FIELD EFFECT TRANSISTORS; FILMS; MEASURING INSTRUMENTS; MINERALS; MOS TRANSISTORS; OXIDE MINERALS; SEMICONDUCTOR DEVICES; WEIGHT INDICATORS
OSTI ID:
21512725
Country of Origin:
Macedonia, The Former Yugoslav Republic of
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0351-3246; TRN: MK1100029104172
Availability:
Available from the National and University Library 'Kliment Ohridski', Skopje, Macedonia
Submitting Site:
INIS
Size:
page(s) 71-79
Announcement Date:
Dec 12, 2011

Citation Formats

Ristov, Milcho, and Mitrevski, Mitre. Construction of simple quartz crystal microbalance. Macedonia, The Former Yugoslav Republic of: N. p., 2003. Web.
Ristov, Milcho, & Mitrevski, Mitre. Construction of simple quartz crystal microbalance. Macedonia, The Former Yugoslav Republic of.
Ristov, Milcho, and Mitrevski, Mitre. 2003. "Construction of simple quartz crystal microbalance." Macedonia, The Former Yugoslav Republic of.
@misc{etde_21512725,
title = {Construction of simple quartz crystal microbalance}
author = {Ristov, Milcho, and Mitrevski, Mitre}
abstractNote = {A very simple Quartz Crystal Microbalance (QCM) was constructed for the measurement of thickness of chemically deposited thin films. QCM consisted of two active elements: one dual-gate MOSFET and one bipolar transistor, and as usually two AT-cut quartz crystal. The beat frequency oscillation generated as a result of loading of the sensor crystal by the deposited thin film, was measured by HP-multimeter, set as a low frequency meter. The sensitivity was found to be high and satisfactory for the study of growth rate of thin films, mainly deposited by methods of chemical deposition.}
journal = []
volume = {23-24}
place = {Macedonia, The Former Yugoslav Republic of}
year = {2003}
month = {Jul}
}