Abstract
Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.
Chu, Y S;
Yi, J M;
De Carlo, F;
Shen, Q;
Lee, Wah-Keat;
[1]
Wu, H J;
Wang, C L;
Wang, J Y;
Liu, C J;
Wang, C H;
[2]
Wu, S R;
Chien, C C;
[2]
Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)];
Hwu, Y;
[2]
Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China);
Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China);
National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)];
Tkachuk, A;
Yun, W;
Feser, M;
[3]
Liang, K S;
[4]
Yang, C S;
[5]
Je, J H;
[6]
Margaritondo, G
[7]
- Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
- Institute of Physics, Academia Sinica, Taipei 115, Taiwan (China)
- Xradia Inc., 5052 Commercial Circle, Concord, California 94520 (United States)
- National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)
- Center for Nanomedicine, National Health Research Institutes, Miaoli 350, Taiwan (China)
- X-ray Imaging Center, Pohang University of Science and Technology, Pohang 790-784 (Korea, Republic of)
- Ecole Polytechnique Federale de Lausanne (EPFL), CH-1015 Lausanne (Switzerland)
Citation Formats
Chu, Y S, Yi, J M, De Carlo, F, Shen, Q, Lee, Wah-Keat, Wu, H J, Wang, C L, Wang, J Y, Liu, C J, Wang, C H, Wu, S R, Chien, C C, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)], Hwu, Y, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China), Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China), National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)], Tkachuk, A, Yun, W, Feser, M, Liang, K S, Yang, C S, Je, J H, and Margaritondo, G.
Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution.
United States: N. p.,
2008.
Web.
doi:10.1063/1.2857476.
Chu, Y S, Yi, J M, De Carlo, F, Shen, Q, Lee, Wah-Keat, Wu, H J, Wang, C L, Wang, J Y, Liu, C J, Wang, C H, Wu, S R, Chien, C C, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)], Hwu, Y, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China), Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China), National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)], Tkachuk, A, Yun, W, Feser, M, Liang, K S, Yang, C S, Je, J H, & Margaritondo, G.
Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution.
United States.
https://doi.org/10.1063/1.2857476
Chu, Y S, Yi, J M, De Carlo, F, Shen, Q, Lee, Wah-Keat, Wu, H J, Wang, C L, Wang, J Y, Liu, C J, Wang, C H, Wu, S R, Chien, C C, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)], Hwu, Y, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China), Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China), National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)], Tkachuk, A, Yun, W, Feser, M, Liang, K S, Yang, C S, Je, J H, and Margaritondo, G.
2008.
"Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution."
United States.
https://doi.org/10.1063/1.2857476.
@misc{etde_21120584,
title = {Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution}
author = {Chu, Y S, Yi, J M, De Carlo, F, Shen, Q, Lee, Wah-Keat, Wu, H J, Wang, C L, Wang, J Y, Liu, C J, Wang, C H, Wu, S R, Chien, C C, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)], Hwu, Y, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China), Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China), National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)], Tkachuk, A, Yun, W, Feser, M, Liang, K S, Yang, C S, Je, J H, and Margaritondo, G}
abstractNote = {Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.}
doi = {10.1063/1.2857476}
journal = []
issue = {10}
volume = {92}
place = {United States}
year = {2008}
month = {Mar}
}
title = {Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution}
author = {Chu, Y S, Yi, J M, De Carlo, F, Shen, Q, Lee, Wah-Keat, Wu, H J, Wang, C L, Wang, J Y, Liu, C J, Wang, C H, Wu, S R, Chien, C C, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China)], Hwu, Y, Department of Engineering Science and System, National Tsing Hua University, Hsinchu 300, Taiwan (China), Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan (China), National Synchrotron Radiation Research Center, Hsinchu 300, Taiwan (China)], Tkachuk, A, Yun, W, Feser, M, Liang, K S, Yang, C S, Je, J H, and Margaritondo, G}
abstractNote = {Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed.}
doi = {10.1063/1.2857476}
journal = []
issue = {10}
volume = {92}
place = {United States}
year = {2008}
month = {Mar}
}