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Kinetics of Hydrocarbon formation in a- C:H Film deposition plasmas

Abstract

The formation of C2 and Cp hydrocarbons during the PACVD of a-C:H films from admixtures of methane with H2 and He has been investigated by mass spectrometry under several deposition condition. The time evolution of the observed species indicates that the formation mechanisms of ethylene and acetylene are sensitive to the conditions of the wall during the growing of the film. Acetylene are sensitive to the conditions of the wall during the growing of the film. Acetylene formation was found to be directly related to the formation of the film on top of the carburized metal. (Author) 12 refs.
Publication Date:
Jul 01, 1993
Product Type:
Technical Report
Report Number:
CIEMAT-711
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; GLOW DISCHARGES; CARBONIZATION; MASS SPECTROSCOPY; VAPOR DEPOSITED COATINGS; THERMONUCLEAR REACTOR WALLS; THIN FILMS; KINETICS
OSTI ID:
20897483
Research Organizations:
Centro de Investigaciones Energeticas Medioambientales y Tecnologicas (CIEMAT), Madrid (Spain)
Country of Origin:
Spain
Language:
English
Other Identifying Numbers:
TRN: ES07B0381
Availability:
Commercial reproduction prohibited; OSTI as DE20897483
Submitting Site:
SPN
Size:
20 pages
Announcement Date:
Aug 10, 2007

Citation Formats

Cal, E de la, and Tabares, F L. Kinetics of Hydrocarbon formation in a- C:H Film deposition plasmas. Spain: N. p., 1993. Web.
Cal, E de la, & Tabares, F L. Kinetics of Hydrocarbon formation in a- C:H Film deposition plasmas. Spain.
Cal, E de la, and Tabares, F L. 1993. "Kinetics of Hydrocarbon formation in a- C:H Film deposition plasmas." Spain.
@misc{etde_20897483,
title = {Kinetics of Hydrocarbon formation in a- C:H Film deposition plasmas}
author = {Cal, E de la, and Tabares, F L}
abstractNote = {The formation of C2 and Cp hydrocarbons during the PACVD of a-C:H films from admixtures of methane with H2 and He has been investigated by mass spectrometry under several deposition condition. The time evolution of the observed species indicates that the formation mechanisms of ethylene and acetylene are sensitive to the conditions of the wall during the growing of the film. Acetylene are sensitive to the conditions of the wall during the growing of the film. Acetylene formation was found to be directly related to the formation of the film on top of the carburized metal. (Author) 12 refs.}
place = {Spain}
year = {1993}
month = {Jul}
}