. The refractive index and reflectivity of ASi:H and Si Ox thin layer have been observed by optical absorption methods. Measurement has been done after the preparation of optical system which consists of a halogen lamp light source, monochromator, sample and light detector. The Monochromator output showed that measured halogen lamp spectrum light is between 470 nm -750 nm. The maximum voltage of halogen lamp is 220 Volt, the output light increases in intensity while the wave length increases. The inclination of intensity decrease at the wave length of 725 nm. The result of the calculation of refractive index varies in accordance with the wave length. The average refractive index of ASi:H is nf a = 1.753. The total reflectivity of air-thin layer-substrate is Rt a = 0.315. The refractive index of Si Ox sample is nf b2.182 and the total reflectivity is Rt b=O,514.