You need JavaScript to view this

Elastic nano-structure of diamond-like carbon (DLC)

Abstract

This research discusses the elastic nano-structure of diamond-like carbon (DLC) films. Two DLC film samples deposited by plasma based ion implantation (PBII) were prepared. The plasma generated by microwave (MW) was applied to one sample and the plasma by radio frequency (RF) to the other sample. The samples were evaluated for the elastic property image with nanometer resolution using scanning probe microscopy (SPM). The film surface deposited by RF-PBII was very flat and homogeneous in elastic property. In contrast, the film surface by MW-PBII was more uneven than that by RF-PBII and both the locally hard and the locally soft regions were found at the film surface. The size of the structure in elastic property is several tens nanometer. We conclude that the film probably contains nano-scale diamond phase.
Authors:
Ogiso, Hisato; [1]  Yoshida, Mikiko; [1]  Nakano, Shizuka; [1]  Yasui, Haruyuki; [2]  Awazu, Kaoru [2] 
  1. National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564 (Japan)
  2. Industrial Research Institute of Ishikawa (IRII), Ro-1, Tomizu-machi, Kanazawa, Ishikawa 920-0233 (Japan)
Publication Date:
Jan 15, 2006
Product Type:
Journal Article
Resource Relation:
Journal Name: Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms; Journal Volume: 242; Journal Issue: 1-2; Conference: 14. international conference on ion beam modification of materials, Pacific Grove, CA (United States), 5-10 Sep 2004; Other Information: DOI: 10.1016/j.nimb.2005.08.054; PII: S0168-583X(05)01533-8; Copyright (c) 2005 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved; Country of input: International Atomic Energy Agency (IAEA)
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DIAMONDS; ELASTICITY; FILMS; IMAGES; ION IMPLANTATION; MICROSCOPY; MICROWAVE RADIATION; PLASMA; PROBES; RADIOWAVE RADIATION; RESOLUTION; SURFACES
OSTI ID:
20761410
Country of Origin:
Netherlands
Language:
English
Other Identifying Numbers:
Journal ID: ISSN 0168-583X; NIMBEU; TRN: NL06R5182068445
Submitting Site:
NLN
Size:
page(s) 311-314
Announcement Date:
Aug 31, 2006

Citation Formats

Ogiso, Hisato, Yoshida, Mikiko, Nakano, Shizuka, Yasui, Haruyuki, and Awazu, Kaoru. Elastic nano-structure of diamond-like carbon (DLC). Netherlands: N. p., 2006. Web. doi:10.1016/j.nimb.2005.08.054.
Ogiso, Hisato, Yoshida, Mikiko, Nakano, Shizuka, Yasui, Haruyuki, & Awazu, Kaoru. Elastic nano-structure of diamond-like carbon (DLC). Netherlands. doi:10.1016/j.nimb.2005.08.054.
Ogiso, Hisato, Yoshida, Mikiko, Nakano, Shizuka, Yasui, Haruyuki, and Awazu, Kaoru. 2006. "Elastic nano-structure of diamond-like carbon (DLC)." Netherlands. doi:10.1016/j.nimb.2005.08.054. https://www.osti.gov/servlets/purl/10.1016/j.nimb.2005.08.054.
@misc{etde_20761410,
title = {Elastic nano-structure of diamond-like carbon (DLC)}
author = {Ogiso, Hisato, Yoshida, Mikiko, Nakano, Shizuka, Yasui, Haruyuki, and Awazu, Kaoru}
abstractNote = {This research discusses the elastic nano-structure of diamond-like carbon (DLC) films. Two DLC film samples deposited by plasma based ion implantation (PBII) were prepared. The plasma generated by microwave (MW) was applied to one sample and the plasma by radio frequency (RF) to the other sample. The samples were evaluated for the elastic property image with nanometer resolution using scanning probe microscopy (SPM). The film surface deposited by RF-PBII was very flat and homogeneous in elastic property. In contrast, the film surface by MW-PBII was more uneven than that by RF-PBII and both the locally hard and the locally soft regions were found at the film surface. The size of the structure in elastic property is several tens nanometer. We conclude that the film probably contains nano-scale diamond phase.}
doi = {10.1016/j.nimb.2005.08.054}
journal = {Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms}
issue = {1-2}
volume = {242}
place = {Netherlands}
year = {2006}
month = {Jan}
}