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Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs

Abstract

A new vacuum deposition process, named reactive evaporation, is used to realize passive thin film circuits. Using aluminium, oxidized at various steps in its vapor phase, we obtain: - Al-Al{sub 2}O{sub 3} cermet resistors (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm/deg. C) which show oscillations of the resistivity versus the thickness of the layer, in distinction to classical theory. - Al{sub 2}O{sub 3} capacitors (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 per cent). These thin film components present good electrical behaviour and should find interesting applications in integrated circuits. (author) [French] Une nouvelle technique de depot sous vide, l'evaporation reactive est utilisee pour realiser des circuits passifs en couches minces. En oxydant, en phase vapeur, de l'aluminium a differents degres, on obtient: - des resistances en cermet Al-Al{sub 2}O{sub 3} (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm) dont Ia resistivite oscille en fonction de l'epaisseur, contrairement aux previsions de la theorie classique. - Des capacites en Al{sub 2}O{sub 3} (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 pour cent). Ces elements presentent de bonnes caracteristiques electriques et seraient avantageusement utilises en circuits integres. (auteur)
Authors:
Pruniaux, B [1] 
  1. Commissariat a l'Energie Atomique, 38 - Grenoble (France). Centre d'Etudes Nucleaires
Publication Date:
Jul 01, 1967
Product Type:
Thesis/Dissertation
Report Number:
CEA-R-3120
Resource Relation:
Other Information: TH: These docteur-ingenieur; 88 refs; PBD: 1967
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ACCURACY; ALUMINIUM; ALUMINIUM OXIDES; CAPACITORS; ELECTRIC CONDUCTIVITY; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS; VACUUM EVAPORATION
OSTI ID:
20626208
Research Organizations:
CEA Grenoble, 38 (France); Faculte des Sciences de l'Universite de Grenoble, 38 (France)
Country of Origin:
France
Language:
French
Other Identifying Numbers:
TRN: FR05R3120069321
Availability:
Available from INIS in electronic form
Submitting Site:
FRN
Size:
43 pages
Announcement Date:

Citation Formats

Pruniaux, B. Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs. France: N. p., 1967. Web.
Pruniaux, B. Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs. France.
Pruniaux, B. 1967. "Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs." France.
@misc{etde_20626208,
title = {Production and study of mixed Al-Al{sub 2}O{sub 3} thin films for passive electronic circuits; Realisation et etude des couches minces mixtes Al-Al{sub 2}O{sub 3} pour circuits electroniques passifs}
author = {Pruniaux, B}
abstractNote = {A new vacuum deposition process, named reactive evaporation, is used to realize passive thin film circuits. Using aluminium, oxidized at various steps in its vapor phase, we obtain: - Al-Al{sub 2}O{sub 3} cermet resistors (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm/deg. C) which show oscillations of the resistivity versus the thickness of the layer, in distinction to classical theory. - Al{sub 2}O{sub 3} capacitors (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 per cent). These thin film components present good electrical behaviour and should find interesting applications in integrated circuits. (author) [French] Une nouvelle technique de depot sous vide, l'evaporation reactive est utilisee pour realiser des circuits passifs en couches minces. En oxydant, en phase vapeur, de l'aluminium a differents degres, on obtient: - des resistances en cermet Al-Al{sub 2}O{sub 3} (R{sub {open_square}} = 10000 {omega}{sub {open_square}}, CTR <{+-} 150 ppm) dont Ia resistivite oscille en fonction de l'epaisseur, contrairement aux previsions de la theorie classique. - Des capacites en Al{sub 2}O{sub 3} (C{sub {open_square}} = 60000 pf/cm{sup 2}, tg {delta} < 0.5 pour cent). Ces elements presentent de bonnes caracteristiques electriques et seraient avantageusement utilises en circuits integres. (auteur)}
place = {France}
year = {1967}
month = {Jul}
}