Abstract
A sheath voltage drop in asymmetric discharges is one of the most important parameters of radio-frequency capacitively coupled plasmas because it determines the kinetic energy of the ions incident on the target or substrate. In this study, we developed a numerical simulation code to estimate the sheath voltage drops and, consequently, the self-bias voltage. We roughly approximated general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code are consistent with measurements and Lieberman's theory.
Yonemura, Shigeru;
Nanbu, Kenichi;
Iwata, Naoaki
[1]
- Institute of Fluid Science, Tohoku University, Sendai 980-8577 (Japan)
Citation Formats
Yonemura, Shigeru, Nanbu, Kenichi, and Iwata, Naoaki.
Synthesis of sheath voltage drops in asymmetric radio-frequency discharges.
United States: N. p.,
2004.
Web.
doi:10.1063/1.1759787.
Yonemura, Shigeru, Nanbu, Kenichi, & Iwata, Naoaki.
Synthesis of sheath voltage drops in asymmetric radio-frequency discharges.
United States.
https://doi.org/10.1063/1.1759787
Yonemura, Shigeru, Nanbu, Kenichi, and Iwata, Naoaki.
2004.
"Synthesis of sheath voltage drops in asymmetric radio-frequency discharges."
United States.
https://doi.org/10.1063/1.1759787.
@misc{etde_20618999,
title = {Synthesis of sheath voltage drops in asymmetric radio-frequency discharges}
author = {Yonemura, Shigeru, Nanbu, Kenichi, and Iwata, Naoaki}
abstractNote = {A sheath voltage drop in asymmetric discharges is one of the most important parameters of radio-frequency capacitively coupled plasmas because it determines the kinetic energy of the ions incident on the target or substrate. In this study, we developed a numerical simulation code to estimate the sheath voltage drops and, consequently, the self-bias voltage. We roughly approximated general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code are consistent with measurements and Lieberman's theory.}
doi = {10.1063/1.1759787}
journal = []
issue = {1}
volume = {96}
journal type = {AC}
place = {United States}
year = {2004}
month = {Jul}
}
title = {Synthesis of sheath voltage drops in asymmetric radio-frequency discharges}
author = {Yonemura, Shigeru, Nanbu, Kenichi, and Iwata, Naoaki}
abstractNote = {A sheath voltage drop in asymmetric discharges is one of the most important parameters of radio-frequency capacitively coupled plasmas because it determines the kinetic energy of the ions incident on the target or substrate. In this study, we developed a numerical simulation code to estimate the sheath voltage drops and, consequently, the self-bias voltage. We roughly approximated general asymmetric rf discharges to one-dimensional spherical ones. The results obtained by using our simulation code are consistent with measurements and Lieberman's theory.}
doi = {10.1063/1.1759787}
journal = []
issue = {1}
volume = {96}
journal type = {AC}
place = {United States}
year = {2004}
month = {Jul}
}