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Radiation defects formation in silicon at high energy implantation

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Abstract

No abstract prepared.
Authors:
Brinkevich, D I; Odzhaev, V B; Prosolovich, V S; Yankovski, Yu N [1] 
  1. Belarussian State University, Minsk (Belarus)
Publication Date:
Jul 01, 2004
Product Type:
Conference
Resource Relation:
Conference: 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004, Kazimierz Dolny (Poland), 14-17 Jun 2004; Other Information: PBD: 2004; Related Information: In: Abstracts of 5. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2004, 257 pages.
Subject:
36 MATERIALS SCIENCE; ARGON IONS; BORON IONS; CRYSTAL DEFECTS; DEPTH; ELECTRIC CONDUCTIVITY; FRENKEL DEFECTS; HALL EFFECT; INFRARED SPECTRA; ION IMPLANTATION; MONOCRYSTALS; OXYGEN IONS; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; SILICON; SPATIAL DISTRIBUTION
OSTI ID:
20616887
Research Organizations:
Maria Curie-Sklodowska Univ., Lublin (Poland); Technical University, Lublin (Poland); Wroclaw University of Technology, Wroclaw (Poland); Association of Polish Electrical Engineers, Lublin (Poland)
Country of Origin:
Poland
Language:
English
Other Identifying Numbers:
TRN: PL0500572060116
Availability:
Available at Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-910 Warsaw, Poland
Submitting Site:
INIS
Size:
page(s) 134
Announcement Date:
Aug 21, 2005

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Citation Formats

Brinkevich, D I, Odzhaev, V B, Prosolovich, V S, and Yankovski, Yu N. Radiation defects formation in silicon at high energy implantation. Poland: N. p., 2004. Web.
Brinkevich, D I, Odzhaev, V B, Prosolovich, V S, & Yankovski, Yu N. Radiation defects formation in silicon at high energy implantation. Poland.
Brinkevich, D I, Odzhaev, V B, Prosolovich, V S, and Yankovski, Yu N. 2004. "Radiation defects formation in silicon at high energy implantation." Poland.
@misc{etde_20616887,
title = {Radiation defects formation in silicon at high energy implantation}
 author = {Brinkevich, D I, Odzhaev, V B, Prosolovich, V S, and Yankovski, Yu N}
 abstractNote = {No abstract prepared.}
 place = {Poland}
 year = {2004}
 month = {Jul}
 }