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ETDEWEB   /       /    Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza

Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza

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Abstract

No abstract prepared.
Authors:
Petrov, L M; Betsofen, S Ya; Borisov, A M; [1]  Ali, Bakun; Bespalova, O V; Vostrikov, V G; D'yachkovskij, A P; Kulikauskas, V S; Romanovskij, V P; Serkov, M V [2] 
  1. Rossijskij Gosudarstvennyj Tekhnologicheskij Univ. im. K.Eh. Tsiolkovskogo, Moscow (Russian Federation)
  2. NIIYaF MGU, Moscow (Russian Federation)
Publication Date:
Jul 01, 2003
Product Type:
Conference
Report Number:
INIS-RU-484
Resource Relation:
Conference: 33. International conference on physics of charged particle - crystal interaction, 33. Mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami, Moscow (Russian Federation), 26-28 May 2003; Other Information: PBD: 2003; Related Information: In: Abstracts of reports of the 33. International conference on physics of charged particle - crystal interaction, Tezisy dokladov 33. Mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami, by Tulinov, A.F. (ed.), 162 pages.
Subject:
36 MATERIALS SCIENCE; BACKSCATTERING; DEPTH; ION SCATTERING ANALYSIS; LATTICE PARAMETERS; MEV RANGE 01-10; PHYSICAL VAPOR DEPOSITION; PROTON BEAMS; QUANTITATIVE CHEMICAL ANALYSIS; RESIDUAL STRESSES; SPATIAL DISTRIBUTION; TEXTURE; THIN FILMS; TITANIUM NITRIDES
OSTI ID:
20562121
Research Organizations:
Moskovskij Gosudarstvennyj Univ. im. M.V. Lomonosova, Nauchno-Issledovatel'skij Inst. Yadernoj Fiziki im. D.V. Skobel'tsyna, Moscow (Russian Federation)
Country of Origin:
Russian Federation
Language:
Russian
Other Identifying Numbers:
TRN: RU0510302016324
Availability:
Available from INIS in electronic form
Submitting Site:
INIS
Size:
page(s) 149
Announcement Date:
Feb 20, 2005

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Citation Formats

Petrov, L M, Betsofen, S Ya, Borisov, A M, Ali, Bakun, Bespalova, O V, Vostrikov, V G, D'yachkovskij, A P, Kulikauskas, V S, Romanovskij, V P, and Serkov, M V. Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza. Russian Federation: N. p., 2003. Web.
Petrov, L M, Betsofen, S Ya, Borisov, A M, Ali, Bakun, Bespalova, O V, Vostrikov, V G, D'yachkovskij, A P, Kulikauskas, V S, Romanovskij, V P, & Serkov, M V. Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza. Russian Federation.
Petrov, L M, Betsofen, S Ya, Borisov, A M, Ali, Bakun, Bespalova, O V, Vostrikov, V G, D'yachkovskij, A P, Kulikauskas, V S, Romanovskij, V P, and Serkov, M V. 2003. "Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza." Russian Federation.
@misc{etde_20562121,
title = {Investigation of structure and chemical composition of TiN coatings by means of NBS, optical emission spectroscopy of glow discharge and X-ray structural analysis; Issledovanie struktury i khimicheskogo sostava v TiN pokrytiyakh metodami YaOR, opticheskoj ehmissionnoj spektroskopii tleyushchego razryada i rentgenostrukturnogo analiza}
 author = {Petrov, L M, Betsofen, S Ya, Borisov, A M, Ali, Bakun, Bespalova, O V, Vostrikov, V G, D'yachkovskij, A P, Kulikauskas, V S, Romanovskij, V P, and Serkov, M V}
 abstractNote = {No abstract prepared.}
 place = {Russian Federation}
 year = {2003}
 month = {Jul}
 }