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New generation of monolithic active pixel sensors for charged particle detection; Developpement d'un capteur de nouvelle generation et son electronique integree pour les collisionneurs futurs

Abstract

Vertex detectors are of great importance in particle physics experiments, as the knowledge of the event flavour is becoming an issue for the physics programme at Future Linear Colliders. Monolithic Active Pixel Sensors (MAPS) based on a novel detector structure have been proposed. Their fabrication is compatible with a standard CMOS process. The sensor is inseparable from the readout electronics, since both of them are integrated on the same, low-resistivity silicon wafer. The basic pixel configuration comprises only three MOS transistors and a diode collecting the charge through thermal diffusion. The charge is generated in the thin non-depleted epitaxial layer underneath the readout electronics. This approach provides, at low cost, a high resolution and thin device with the whole area sensitive to radiation. Device simulations using the ISE-TCAD package have been carried out to study the charge collection mechanism. In order to demonstrate the viability of the technique, four prototype chips have been fabricated using different submicrometer CMOS processes. The pixel gain has been calibrated using a {sup 55}Fe source and the Poisson sequence method. The prototypes have been exposed to high-energy particle beams at CERN. The tests proved excellent detection performances expressed in a single-track spatial resolution of 1.5  More>>
Authors:
Publication Date:
Sep 01, 2002
Product Type:
Thesis/Dissertation
Report Number:
INIS-FR-1836
Resource Relation:
Other Information: TH: These micro-capteurs et leur electronique integree; PBD: Sep 2002
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; CHARGE COLLECTION; IMAGES; MEASURING INSTRUMENTS; PARTICLE TRACKS; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR DEVICES; SIGNAL-TO-NOISE RATIO; SIMULATION
OSTI ID:
20365972
Research Organizations:
Universite Louis Pasteur, 67 - Strasbourg (France)
Country of Origin:
France
Language:
English; French
Other Identifying Numbers:
TRN: FR0301373049089
Availability:
Available from INIS in electronic form
Submitting Site:
FRN
Size:
318 pages
Announcement Date:
Aug 16, 2003

Citation Formats

Deptuch, G. New generation of monolithic active pixel sensors for charged particle detection; Developpement d'un capteur de nouvelle generation et son electronique integree pour les collisionneurs futurs. France: N. p., 2002. Web.
Deptuch, G. New generation of monolithic active pixel sensors for charged particle detection; Developpement d'un capteur de nouvelle generation et son electronique integree pour les collisionneurs futurs. France.
Deptuch, G. 2002. "New generation of monolithic active pixel sensors for charged particle detection; Developpement d'un capteur de nouvelle generation et son electronique integree pour les collisionneurs futurs." France.
@misc{etde_20365972,
title = {New generation of monolithic active pixel sensors for charged particle detection; Developpement d'un capteur de nouvelle generation et son electronique integree pour les collisionneurs futurs}
author = {Deptuch, G}
abstractNote = {Vertex detectors are of great importance in particle physics experiments, as the knowledge of the event flavour is becoming an issue for the physics programme at Future Linear Colliders. Monolithic Active Pixel Sensors (MAPS) based on a novel detector structure have been proposed. Their fabrication is compatible with a standard CMOS process. The sensor is inseparable from the readout electronics, since both of them are integrated on the same, low-resistivity silicon wafer. The basic pixel configuration comprises only three MOS transistors and a diode collecting the charge through thermal diffusion. The charge is generated in the thin non-depleted epitaxial layer underneath the readout electronics. This approach provides, at low cost, a high resolution and thin device with the whole area sensitive to radiation. Device simulations using the ISE-TCAD package have been carried out to study the charge collection mechanism. In order to demonstrate the viability of the technique, four prototype chips have been fabricated using different submicrometer CMOS processes. The pixel gain has been calibrated using a {sup 55}Fe source and the Poisson sequence method. The prototypes have been exposed to high-energy particle beams at CERN. The tests proved excellent detection performances expressed in a single-track spatial resolution of 1.5 {mu}m and detection efficiency close to 100%, resulting from a SNR ratio of more than 30. Irradiation tests showed immunity of MAPS to a level of a few times 10{sup 12} n/cm{sup 2} and a few hundred kRad of ionising radiation. The ideas for future work, including on-pixel signal amplification, double sampling operation and current mode pixel design are present as well. (author)}
place = {France}
year = {2002}
month = {Sep}
}