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Investigate of analysis for hydrogen contents in carbon films

Conference:

Abstract

Hydrogen is a very common contaminant in carbon films. It can strongly influences on mechanical, physical and chemical properties of the films. The analysis of hydrogen is therefore a crucial problem to prepare the films with the reproducible property. We were measured two kinds of methods. Ion beam techniques using nuclear reactions are established methods for the quantitative determination of hydrogen concentration. A spectrometer has been constructed for the determination of hydrogen concentrations by detecting 4.43 MeV {gamma}-rays from the resonant nuclear reactions {sup 1}H({sup 15}N, {alpha} {gamma}){sup 12}C at the 6.385 MeV. And the other measurement of hydrogen is GDOES (Glow Discharge Optical Emission Spectroscopy), with its high sputtering rates, had been used previously for depth profiling analysis of thin films. The depth profiling analysis was carried out at an argon atmosphere by applying an RF of 13.56 MHz. The sampling time interval was 0.1 sec. The detailed hydrogen analysis was made on BCN (Boron Carbonitride) and DLC (Diamond-like Carbon) thin films. The BCN films were prepared by ion beam assisted deposition, in which boron and carbon were deposited by electron beam heating of B{sub 4}C solid and nitrogen was supplied by implantation simultaneously. The DLC films were prepared  More>>
Authors:
Yasui, Haruyuki; Hirose, Yukio; Sasaki, Toshihiko; [1]  Awazu, Kaoru; [2]  Naramoto, Hiroshi [3] 
  1. Kanazawa Univ., Kanazawa, Ishikawa (Japan)
  2. Industrial Research Institute of Ishikawa, Kanazawa, Ishikawa (Japan)
  3. Japan Atomic Energy Research Inst., Takasaki, Gunma (Japan). Takasaki Radiation Chemistry Research Establishment
Publication Date:
Jul 01, 2001
Product Type:
Conference
Resource Relation:
Conference: 37. symposium on x-ray studies on mechanical behaviour of materials, Kyoto (Japan), 6-7 Sep 2001; Other Information: 15 refs., 7 figs.; PBD: 2001; Related Information: In: Proceedings of the 37th symposium on x-ray studies on mechanical behaviour of materials, Dai-37-kai x-sen zairyo kyodoni kansuru shinpojiumu koen ronbunshu, 291 pages.
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARBON; HYDROGEN; QUANTITATIVE CHEMICAL ANALYSIS; GLOW DISCHARGES; EMISSION SPECTROSCOPY; SPECTROMETERS; NUCLEAR REACTION ANALYSIS; GAMMA DETECTION; CARBONITRIDES; THIN FILMS; BORON; NITROGEN; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS
OSTI ID:
20255215
Research Organizations:
Society of Materials Science, Japan, Kyoto (Japan)
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
TRN: JP0201592
Submitting Site:
JPN
Size:
page(s) 62-66
Announcement Date:
Jul 16, 2002

Conference:

Citation Formats

Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi. Investigate of analysis for hydrogen contents in carbon films. Japan: N. p., 2001. Web.
Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, & Naramoto, Hiroshi. Investigate of analysis for hydrogen contents in carbon films. Japan.
Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi. 2001. "Investigate of analysis for hydrogen contents in carbon films." Japan.
@misc{etde_20255215,
title = {Investigate of analysis for hydrogen contents in carbon films}
author = {Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi}
abstractNote = {Hydrogen is a very common contaminant in carbon films. It can strongly influences on mechanical, physical and chemical properties of the films. The analysis of hydrogen is therefore a crucial problem to prepare the films with the reproducible property. We were measured two kinds of methods. Ion beam techniques using nuclear reactions are established methods for the quantitative determination of hydrogen concentration. A spectrometer has been constructed for the determination of hydrogen concentrations by detecting 4.43 MeV {gamma}-rays from the resonant nuclear reactions {sup 1}H({sup 15}N, {alpha} {gamma}){sup 12}C at the 6.385 MeV. And the other measurement of hydrogen is GDOES (Glow Discharge Optical Emission Spectroscopy), with its high sputtering rates, had been used previously for depth profiling analysis of thin films. The depth profiling analysis was carried out at an argon atmosphere by applying an RF of 13.56 MHz. The sampling time interval was 0.1 sec. The detailed hydrogen analysis was made on BCN (Boron Carbonitride) and DLC (Diamond-like Carbon) thin films. The BCN films were prepared by ion beam assisted deposition, in which boron and carbon were deposited by electron beam heating of B{sub 4}C solid and nitrogen was supplied by implantation simultaneously. The DLC films were prepared by HPPC (Hybrid-pulse plasma coating) system. It was a new coating system that we developed which consists fundamentally of plasma CVD (chemical vapor deposition) and ion-mixing. In this paper, we reported the comparison of analysis for hydrogen contents between RNRA and GDOES. (author)}
place = {Japan}
year = {2001}
month = {Jul}
}