Abstract
A survey was conducted of the 3D nanotechnology which is a technology that aims to create novel functions and to enhance functions in mechanical engineering through the control of large-area 3-dimensional nano-scale structures. In this fiscal year, trends of research and development and technological tasks were surveyed from the viewpoint of nanomanufacturing technology. Basic processing technologies were surveyed, which included the laser-aided or light-aided micromachining technology, chemomechanical processing technology, and nanoparticle beam-aided processing technology. In the research of mass production technologies, the nanostructure transfer technology superior in capability to the conventional photolithography was taken up. Nanomanipulation technologies were also surveyed, such as atomic/molecular-level observation, assessment, processing, fixation, and the like. Technologies involving machine elements and structures were surveyed, when microactuators and micromechanisms were studied, such as nano-scale functional films. Lastly, a proposition was made about research and development tasks for the future and about how to work on such tasks. (NEDO)
Citation Formats
None.
Fiscal 2000 pioneering research report on the 3D nanotechnology; 2000 nendo 3D nano technology sendo kenkyu hokokusho.
Japan: N. p.,
2001.
Web.
None.
Fiscal 2000 pioneering research report on the 3D nanotechnology; 2000 nendo 3D nano technology sendo kenkyu hokokusho.
Japan.
None.
2001.
"Fiscal 2000 pioneering research report on the 3D nanotechnology; 2000 nendo 3D nano technology sendo kenkyu hokokusho."
Japan.
@misc{etde_20232943,
title = {Fiscal 2000 pioneering research report on the 3D nanotechnology; 2000 nendo 3D nano technology sendo kenkyu hokokusho}
author = {None}
abstractNote = {A survey was conducted of the 3D nanotechnology which is a technology that aims to create novel functions and to enhance functions in mechanical engineering through the control of large-area 3-dimensional nano-scale structures. In this fiscal year, trends of research and development and technological tasks were surveyed from the viewpoint of nanomanufacturing technology. Basic processing technologies were surveyed, which included the laser-aided or light-aided micromachining technology, chemomechanical processing technology, and nanoparticle beam-aided processing technology. In the research of mass production technologies, the nanostructure transfer technology superior in capability to the conventional photolithography was taken up. Nanomanipulation technologies were also surveyed, such as atomic/molecular-level observation, assessment, processing, fixation, and the like. Technologies involving machine elements and structures were surveyed, when microactuators and micromechanisms were studied, such as nano-scale functional films. Lastly, a proposition was made about research and development tasks for the future and about how to work on such tasks. (NEDO)}
place = {Japan}
year = {2001}
month = {Mar}
}
title = {Fiscal 2000 pioneering research report on the 3D nanotechnology; 2000 nendo 3D nano technology sendo kenkyu hokokusho}
author = {None}
abstractNote = {A survey was conducted of the 3D nanotechnology which is a technology that aims to create novel functions and to enhance functions in mechanical engineering through the control of large-area 3-dimensional nano-scale structures. In this fiscal year, trends of research and development and technological tasks were surveyed from the viewpoint of nanomanufacturing technology. Basic processing technologies were surveyed, which included the laser-aided or light-aided micromachining technology, chemomechanical processing technology, and nanoparticle beam-aided processing technology. In the research of mass production technologies, the nanostructure transfer technology superior in capability to the conventional photolithography was taken up. Nanomanipulation technologies were also surveyed, such as atomic/molecular-level observation, assessment, processing, fixation, and the like. Technologies involving machine elements and structures were surveyed, when microactuators and micromechanisms were studied, such as nano-scale functional films. Lastly, a proposition was made about research and development tasks for the future and about how to work on such tasks. (NEDO)}
place = {Japan}
year = {2001}
month = {Mar}
}