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Measurement of hydrogen in BCN films by nuclear reaction analysis

Journal Article:

Abstract

Hydrogen is a very common contaminant in carbon films. It can strongly influence on mechanical, physical and chemical properties of the films. The analysis of hydrogen is therefore a crucial problem produce the films with the properties required. Ion beam techniques using nuclear reactions are effective for the quantitative determination of hydrogen concentration. A specially designed spectrometer is employed for the detailed determination of hydrogen concentrations by detecting 4.43MeV {gamma}-rays from the resonant nuclear reactions {sup 1}H({sup 15}N, {alpha}{gamma}){sup 12}C at the 6.385MeV. In this study, the BCN films were formed on silicon substrate by ion beam assisted deposition (IBAD), in which boron and carbon were deposited by electron beam heating of B{sub 4}C solid and nitrogen was supplied by ion implantation simultaneously. The concentrations of hydrogen in BCN films were measured using RNRA. The mechanical properties of BCN films were evaluated using an ultra-micro-hardness tester. It was confirmed that the hardness of BCN films increased with increasing the concentration of hydrogen. (author)
Authors:
Yasui, Haruyuki; Hirose, Yukio; Sasaki, Toshihiko; [1]  Awazu, Kaoru; [2]  Naramoto, Hiroshi [3] 
  1. Kanazawa Univ. (Japan)
  2. Industrial Research Inst., of Ishikawa, Kanazawa (Japan)
  3. Japan Atomic Energy Research Inst., Takasaki, Gunma (Japan). Takasaki Radiation Chemistry Research Establishment
Publication Date:
Jul 01, 2001
Product Type:
Journal Article
Reference Number:
EDB-01:090184
Resource Relation:
Journal Name: Zairyo; Journal Volume: 50; Journal Issue: 7; Other Information: 9 refs., 7 figs., 2 tabs.; PBD: Jul 2001
Subject:
36 MATERIALS SCIENCE; CARBONITRIDES; BORON COMPOUNDS; FILMS; HYDROGEN; NITROGEN 15 BEAMS; NUCLEAR REACTIONS; GAMMA RADIATION; RESONANCE; NUCLEAR REACTION YIELD; HARDNESS
OSTI ID:
20196901
Country of Origin:
Japan
Language:
Japanese
Other Identifying Numbers:
Journal ID: ISSN 0514-5163; TRN: JP0103506
Submitting Site:
JPN
Size:
page(s) 727-731
Announcement Date:
Oct 27, 2001

Journal Article:

Citation Formats

Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi. Measurement of hydrogen in BCN films by nuclear reaction analysis. Japan: N. p., 2001. Web.
Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, & Naramoto, Hiroshi. Measurement of hydrogen in BCN films by nuclear reaction analysis. Japan.
Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi. 2001. "Measurement of hydrogen in BCN films by nuclear reaction analysis." Japan.
@misc{etde_20196901,
title = {Measurement of hydrogen in BCN films by nuclear reaction analysis}
author = {Yasui, Haruyuki, Hirose, Yukio, Sasaki, Toshihiko, Awazu, Kaoru, and Naramoto, Hiroshi}
abstractNote = {Hydrogen is a very common contaminant in carbon films. It can strongly influence on mechanical, physical and chemical properties of the films. The analysis of hydrogen is therefore a crucial problem produce the films with the properties required. Ion beam techniques using nuclear reactions are effective for the quantitative determination of hydrogen concentration. A specially designed spectrometer is employed for the detailed determination of hydrogen concentrations by detecting 4.43MeV {gamma}-rays from the resonant nuclear reactions {sup 1}H({sup 15}N, {alpha}{gamma}){sup 12}C at the 6.385MeV. In this study, the BCN films were formed on silicon substrate by ion beam assisted deposition (IBAD), in which boron and carbon were deposited by electron beam heating of B{sub 4}C solid and nitrogen was supplied by ion implantation simultaneously. The concentrations of hydrogen in BCN films were measured using RNRA. The mechanical properties of BCN films were evaluated using an ultra-micro-hardness tester. It was confirmed that the hardness of BCN films increased with increasing the concentration of hydrogen. (author)}
journal = {Zairyo}
issue = {7}
volume = {50}
journal type = {AC}
place = {Japan}
year = {2001}
month = {Jul}
}