Abstract
Described herein are the FY 1991 results of the R and D project aimed at establishment of superprecision machining technologies for developing machining technologies and nano-technologies aided by excited beams. For increasing the excimer laser output, the discharge-exciting technologies necessary for designing the 2kW laser as the final target are established. The service life tests are started to demonstrate the member service life of 10{sup 9} shots or more. For development of the technologies for large-current composite ion beams, the plant is constructed to attain the final targets (100keV, 2A, width: 500mm or more). The currents reaching the substrate are developed to have 2.8mA with the Ar ion and 2.9mA with the Ca ion by, e.g., developing the ion sources and improving functions of the ion beam controlling systems. Researches on the surface modification technologies for producing the superhigh-quality metallic surfaces involve composite ion implantation and providing the modified layer of Ti-B-based hard compound. Corrosion rate of the modified titanium surface in a boiling sulfuric acid solution is reduced from 300mm/year to around 0.13mm/year. (NEDO)
Citation Formats
None.
FY 1991 Research and development project for large-scale industrial technologies. Report on results of R and D of superhigh technological machining systems (Development of advanced machining devices for power-generating members); 1991 nendo chosentan kako system no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo buzai kodo kako sochi kaihatsu.
Japan: N. p.,
1992.
Web.
None.
FY 1991 Research and development project for large-scale industrial technologies. Report on results of R and D of superhigh technological machining systems (Development of advanced machining devices for power-generating members); 1991 nendo chosentan kako system no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo buzai kodo kako sochi kaihatsu.
Japan.
None.
1992.
"FY 1991 Research and development project for large-scale industrial technologies. Report on results of R and D of superhigh technological machining systems (Development of advanced machining devices for power-generating members); 1991 nendo chosentan kako system no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo buzai kodo kako sochi kaihatsu."
Japan.
@misc{etde_20163349,
title = {FY 1991 Research and development project for large-scale industrial technologies. Report on results of R and D of superhigh technological machining systems (Development of advanced machining devices for power-generating members); 1991 nendo chosentan kako system no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo buzai kodo kako sochi kaihatsu}
author = {None}
abstractNote = {Described herein are the FY 1991 results of the R and D project aimed at establishment of superprecision machining technologies for developing machining technologies and nano-technologies aided by excited beams. For increasing the excimer laser output, the discharge-exciting technologies necessary for designing the 2kW laser as the final target are established. The service life tests are started to demonstrate the member service life of 10{sup 9} shots or more. For development of the technologies for large-current composite ion beams, the plant is constructed to attain the final targets (100keV, 2A, width: 500mm or more). The currents reaching the substrate are developed to have 2.8mA with the Ar ion and 2.9mA with the Ca ion by, e.g., developing the ion sources and improving functions of the ion beam controlling systems. Researches on the surface modification technologies for producing the superhigh-quality metallic surfaces involve composite ion implantation and providing the modified layer of Ti-B-based hard compound. Corrosion rate of the modified titanium surface in a boiling sulfuric acid solution is reduced from 300mm/year to around 0.13mm/year. (NEDO)}
place = {Japan}
year = {1992}
month = {Mar}
}
title = {FY 1991 Research and development project for large-scale industrial technologies. Report on results of R and D of superhigh technological machining systems (Development of advanced machining devices for power-generating members); 1991 nendo chosentan kako system no kenkyu kaihatsu seika hokokusho. Hatsuden shisetsuyo buzai kodo kako sochi kaihatsu}
author = {None}
abstractNote = {Described herein are the FY 1991 results of the R and D project aimed at establishment of superprecision machining technologies for developing machining technologies and nano-technologies aided by excited beams. For increasing the excimer laser output, the discharge-exciting technologies necessary for designing the 2kW laser as the final target are established. The service life tests are started to demonstrate the member service life of 10{sup 9} shots or more. For development of the technologies for large-current composite ion beams, the plant is constructed to attain the final targets (100keV, 2A, width: 500mm or more). The currents reaching the substrate are developed to have 2.8mA with the Ar ion and 2.9mA with the Ca ion by, e.g., developing the ion sources and improving functions of the ion beam controlling systems. Researches on the surface modification technologies for producing the superhigh-quality metallic surfaces involve composite ion implantation and providing the modified layer of Ti-B-based hard compound. Corrosion rate of the modified titanium surface in a boiling sulfuric acid solution is reduced from 300mm/year to around 0.13mm/year. (NEDO)}
place = {Japan}
year = {1992}
month = {Mar}
}