Abstract
Reported are the results of 'Research of 3-Dimensional Ion Processing Technologies.' Tasks to solve before the practical application of 3-dimensional technologies are extracted, and the possible effects of the new technologies on the creation of novel industries are investigated. In the field of new processing technologies, the special characteristics, current state, and tasks to solve are reported concerning the implantation technology, film formation technology, and hybridization which utilize plasma ion implantation. In the field of element technologies for device development, the current state and tasks of high-density plasma generation, homogeneous implantation, etc., are taken up, and the need is mentioned of inductively coupled plasma and surface wave excited plasma. As regards homogeneous implantation, the need is mentioned of technologies for forming matrix sheaths and pulsed plasma. In the field of 3-dimensional ion processing technologies application to the production of commercial goods, large items and their components such as automobiles, rollers, turbines, etc., are taken up, and the surface reforming technologies are reported, with reference made to their current state, tasks, predicted future market, concurrent technologies, feasibility of their application, the hopes and expectations they have aroused, etc. (NEDO)
Citation Formats
None.
Leading research and study report for fiscal 1998. Research and study of 3-dimensional ion processing technologies; 1998 nendo sendo chosa kenkyu hokokusho. Sanjigen ion kako gijutsu no chosa kenkyu.
Japan: N. p.,
1999.
Web.
None.
Leading research and study report for fiscal 1998. Research and study of 3-dimensional ion processing technologies; 1998 nendo sendo chosa kenkyu hokokusho. Sanjigen ion kako gijutsu no chosa kenkyu.
Japan.
None.
1999.
"Leading research and study report for fiscal 1998. Research and study of 3-dimensional ion processing technologies; 1998 nendo sendo chosa kenkyu hokokusho. Sanjigen ion kako gijutsu no chosa kenkyu."
Japan.
@misc{etde_20011972,
title = {Leading research and study report for fiscal 1998. Research and study of 3-dimensional ion processing technologies; 1998 nendo sendo chosa kenkyu hokokusho. Sanjigen ion kako gijutsu no chosa kenkyu}
author = {None}
abstractNote = {Reported are the results of 'Research of 3-Dimensional Ion Processing Technologies.' Tasks to solve before the practical application of 3-dimensional technologies are extracted, and the possible effects of the new technologies on the creation of novel industries are investigated. In the field of new processing technologies, the special characteristics, current state, and tasks to solve are reported concerning the implantation technology, film formation technology, and hybridization which utilize plasma ion implantation. In the field of element technologies for device development, the current state and tasks of high-density plasma generation, homogeneous implantation, etc., are taken up, and the need is mentioned of inductively coupled plasma and surface wave excited plasma. As regards homogeneous implantation, the need is mentioned of technologies for forming matrix sheaths and pulsed plasma. In the field of 3-dimensional ion processing technologies application to the production of commercial goods, large items and their components such as automobiles, rollers, turbines, etc., are taken up, and the surface reforming technologies are reported, with reference made to their current state, tasks, predicted future market, concurrent technologies, feasibility of their application, the hopes and expectations they have aroused, etc. (NEDO)}
place = {Japan}
year = {1999}
month = {Mar}
}
title = {Leading research and study report for fiscal 1998. Research and study of 3-dimensional ion processing technologies; 1998 nendo sendo chosa kenkyu hokokusho. Sanjigen ion kako gijutsu no chosa kenkyu}
author = {None}
abstractNote = {Reported are the results of 'Research of 3-Dimensional Ion Processing Technologies.' Tasks to solve before the practical application of 3-dimensional technologies are extracted, and the possible effects of the new technologies on the creation of novel industries are investigated. In the field of new processing technologies, the special characteristics, current state, and tasks to solve are reported concerning the implantation technology, film formation technology, and hybridization which utilize plasma ion implantation. In the field of element technologies for device development, the current state and tasks of high-density plasma generation, homogeneous implantation, etc., are taken up, and the need is mentioned of inductively coupled plasma and surface wave excited plasma. As regards homogeneous implantation, the need is mentioned of technologies for forming matrix sheaths and pulsed plasma. In the field of 3-dimensional ion processing technologies application to the production of commercial goods, large items and their components such as automobiles, rollers, turbines, etc., are taken up, and the surface reforming technologies are reported, with reference made to their current state, tasks, predicted future market, concurrent technologies, feasibility of their application, the hopes and expectations they have aroused, etc. (NEDO)}
place = {Japan}
year = {1999}
month = {Mar}
}