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Surface processing by high power excimer laser

Abstract

Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at {lambda} = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main  More>>
Authors:
Stehle, M [1] 
  1. SOPRA, 92 - Bois-Colombes (France)
Publication Date:
Mar 01, 1995
Product Type:
Conference
Report Number:
JAERI-Conf-95-005(v.1); CONF-9403144-
Reference Number:
SCA: 070205; PA: JPN-95:011081; EDB-96:025600; SN: 96001519416
Resource Relation:
Conference: 6. international symposium on advanced nuclear energy research, Mito (Japan), 23-25 Mar 1994; Other Information: PBD: Mar 1995; Related Information: Is Part Of Innovative laser technologies in nuclear energy. Proceedings of the 6th international symposium on advanced nuclear energy research; PB: 383 p.
Subject:
07 ISOTOPE AND RADIATION SOURCE TECHNOLOGY; SURFACE TREATMENTS; KRYPTON FLUORIDE LASERS; GLAZES; ULTRAVIOLET SPECTRA; LASER SPECTROSCOPY; POWER DISTRIBUTION; CORROSION RESISTANCE; TURBINE BLADES; CERAMICS; WEAR RESISTANCE; DECONTAMINATION; NUCLEAR INDUSTRY
OSTI ID:
177730
Research Organizations:
Japan Atomic Energy Research Inst., Tokyo (Japan)
Country of Origin:
Japan
Language:
English
Other Identifying Numbers:
Other: ON: DE95502216; TRN: JP9511081
Availability:
INIS; OSTI as DE95502216
Submitting Site:
JPN
Size:
pp. 223-228
Announcement Date:

Citation Formats

Stehle, M. Surface processing by high power excimer laser. Japan: N. p., 1995. Web.
Stehle, M. Surface processing by high power excimer laser. Japan.
Stehle, M. 1995. "Surface processing by high power excimer laser." Japan.
@misc{etde_177730,
title = {Surface processing by high power excimer laser}
author = {Stehle, M}
abstractNote = {Surface processing with lasers is a promising field of research and applications because lasers bring substantial advantages : laser beams work at distance, laser treatments are clean in respect of environment consideration and they offer innovative capabilities for surface treatment which cannot be reached by other way. Excimer lasers are pulsed, gaseous lasers which emit in UV spectral range - the most common are XeCl (308 nm), KrF (248 nm), ArF (193 nm). From 1980 up to 1994, many of them have been used for research, medical and industrial applications such as spectroscopy, PRK (photo-refractive keratotomy) and micro-machining. In the last six years, from 1987 up to 1993, efforts have been done in order to jump from 100 W average power up to 1 kW for XeCl laser at {lambda} = 308 nm. It was the aim of AMMTRA project in Japan as EU205 and EU213 Eureka projects in Europe. In this framework, SOPRA developed VEL (Very large Excimer Laser). In 1992, 1 kW (10 J x 100 Hz) millstone has been reached for the first time, this technology is based on X-Ray preionization and large laser medium (5 liters). Surface treatments based on this laser source are the main purpose of VEL Lasers. Some of them are given for instance : (a) Turbine blades made with metallic substrate and ceramic coatings on the top, are glazed in order to increase corrosion resistance of ceramic and metal sandwich. (b) Selective ablation of organic coatings deposited on fragile composite material is investigated in Aerospace industry. (c) Chock hardening of bulk metallic materials or alloys are investigated for automotive industry in order to increase wear resistance. (d) Ablation of thin surface oxides of polluted steels are under investigation in nuclear industry for decontamination. (J.P.N.).}
place = {Japan}
year = {1995}
month = {Mar}
}