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Optimization of Edwards vacuum coating unit model E12E for the production of thin films.; Optimizacion de la evaporadora Edwards modelo E12E para la fabricacion de peliculas delgadas.

Abstract

This work is about an Edwards vacuum coating unit model E12E, it shows the principle of vacuum thermal evaporation, some observations in the operation of vacuum diffusion pumps, mechanical pumps, vacuum gauge, Penning and Pirani, and some equations of leak vacuum, after the modifications and additions of Edwards vacuum coating unit for optimization, the last part contains a concise introduction about thin films and one specific application, it also contains the recommendations and requirements to keep the system in good conditions. (Author).
Authors:
Publication Date:
Oct 01, 1995
Product Type:
Thesis/Dissertation
Report Number:
INIS-mf-14596
Reference Number:
SCA: 360101; 665200; PA: AIX-26:070121; EDB-95:149103; NTS-96:007146; SN: 95001471664
Resource Relation:
Other Information: TH: Thesis (Mechanical and Electrical Engineer).; PBD: 1995
Subject:
36 MATERIALS SCIENCE; 66 PHYSICS; THIN FILMS; VACUUM COATING; GOLD; HIGH PRESSURE; JOULE HEATING; PIRANI GAGES; PRESSURE GAGES; PVC; SUBSTRATES; VACUUM EVAPORATION; VAPOR DEPOSITED COATINGS
OSTI ID:
124803
Research Organizations:
Universidad Nacional Autonoma de Mexico, Mexico City (Mexico)
Country of Origin:
Mexico
Language:
Spanish
Other Identifying Numbers:
Other: ON: DE96602749; TRN: MX9500015070121
Availability:
INIS; OSTI as DE96602749
Submitting Site:
INIS
Size:
72 p.
Announcement Date:

Citation Formats

Ruiz P, H S. Optimization of Edwards vacuum coating unit model E12E for the production of thin films.; Optimizacion de la evaporadora Edwards modelo E12E para la fabricacion de peliculas delgadas.. Mexico: N. p., 1995. Web.
Ruiz P, H S. Optimization of Edwards vacuum coating unit model E12E for the production of thin films.; Optimizacion de la evaporadora Edwards modelo E12E para la fabricacion de peliculas delgadas.. Mexico.
Ruiz P, H S. 1995. "Optimization of Edwards vacuum coating unit model E12E for the production of thin films.; Optimizacion de la evaporadora Edwards modelo E12E para la fabricacion de peliculas delgadas." Mexico.
@misc{etde_124803,
title = {Optimization of Edwards vacuum coating unit model E12E for the production of thin films.; Optimizacion de la evaporadora Edwards modelo E12E para la fabricacion de peliculas delgadas.}
author = {Ruiz P, H S}
abstractNote = {This work is about an Edwards vacuum coating unit model E12E, it shows the principle of vacuum thermal evaporation, some observations in the operation of vacuum diffusion pumps, mechanical pumps, vacuum gauge, Penning and Pirani, and some equations of leak vacuum, after the modifications and additions of Edwards vacuum coating unit for optimization, the last part contains a concise introduction about thin films and one specific application, it also contains the recommendations and requirements to keep the system in good conditions. (Author).}
place = {Mexico}
year = {1995}
month = {Oct}
}