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Dielectric properties of vacuum deposited vanadium pentoxide thin film capacitor

Abstract

Thin film capacitors with vanadium pentoxide of various thickness (165-320 nm) have been prepared by vacuum deposition. The dielectric constants of these films are thickness dependent and have values between 97 and 137. Capacitances are found to decrease with increasing frequency and show a minimum around 100 kHz. The temperature coefficient of capacitance is found to be 1300-2300 ppm/K. The capacitors are stable and have high capacitance density (0.4 {mu} F/cm{sup 2}) and breakdown field (- 10{sup 5} V/cm). (author). 17 refs., 5 figs.
Authors:
Pankajakshan, V S; Neelakandan, K; [1]  Menon, C S [2] 
  1. Univ. of Calicut, Calicut (India). Dept. of Physics
  2. Mahatma Gandhi Univ., Kottayam (India). School of Pure and Applied Physics
Publication Date:
Sep 01, 1994
Product Type:
Journal Article
Reference Number:
SCA: 360204; PA: AIX-26:059195; EDB-95:130561; SN: 95001462105
Resource Relation:
Journal Name: Indian Journal of Physics, Part A; Journal Volume: 68; Journal Issue: 5; Other Information: PBD: Sep 1994
Subject:
36 MATERIALS SCIENCE; VANADIUM OXIDES; DIELECTRIC PROPERTIES; CAPACITANCE; CAPACITORS; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS; VACUUM COATING
OSTI ID:
101557
Country of Origin:
India
Language:
English
Other Identifying Numbers:
Journal ID: INJADP; ISSN 0252-9262; TRN: IN9501014059195
Submitting Site:
INIS
Size:
pp. 485-490
Announcement Date:
Oct 06, 1995

Citation Formats

Pankajakshan, V S, Neelakandan, K, and Menon, C S. Dielectric properties of vacuum deposited vanadium pentoxide thin film capacitor. India: N. p., 1994. Web.
Pankajakshan, V S, Neelakandan, K, & Menon, C S. Dielectric properties of vacuum deposited vanadium pentoxide thin film capacitor. India.
Pankajakshan, V S, Neelakandan, K, and Menon, C S. 1994. "Dielectric properties of vacuum deposited vanadium pentoxide thin film capacitor." India.
@misc{etde_101557,
title = {Dielectric properties of vacuum deposited vanadium pentoxide thin film capacitor}
author = {Pankajakshan, V S, Neelakandan, K, and Menon, C S}
abstractNote = {Thin film capacitors with vanadium pentoxide of various thickness (165-320 nm) have been prepared by vacuum deposition. The dielectric constants of these films are thickness dependent and have values between 97 and 137. Capacitances are found to decrease with increasing frequency and show a minimum around 100 kHz. The temperature coefficient of capacitance is found to be 1300-2300 ppm/K. The capacitors are stable and have high capacitance density (0.4 {mu} F/cm{sup 2}) and breakdown field (- 10{sup 5} V/cm). (author). 17 refs., 5 figs.}
journal = []
issue = {5}
volume = {68}
journal type = {AC}
place = {India}
year = {1994}
month = {Sep}
}