Abstract
The possibility to make use of polarized ion beams in the backscattering method with the purpose of increasing its sensitivity to investigation of light surface dopants is discussed. The equation for calculation if the necessary initial energy of incident ions was obtained. The investigation of surface dopants in silicon is discussed as a example. 4 refs.; 2 figs.
Citation Formats
Soroka, V I.
Use of polarized ion beams in nuclear microanalysis; Ispol`zovanie puchkov polyarizovannykh ionov v yadernom mikrokanalize.
Ukraine: N. p.,
1990.
Web.
Soroka, V I.
Use of polarized ion beams in nuclear microanalysis; Ispol`zovanie puchkov polyarizovannykh ionov v yadernom mikrokanalize.
Ukraine.
Soroka, V I.
1990.
"Use of polarized ion beams in nuclear microanalysis; Ispol`zovanie puchkov polyarizovannykh ionov v yadernom mikrokanalize."
Ukraine.
@misc{etde_10145713,
title = {Use of polarized ion beams in nuclear microanalysis; Ispol`zovanie puchkov polyarizovannykh ionov v yadernom mikrokanalize}
author = {Soroka, V I}
abstractNote = {The possibility to make use of polarized ion beams in the backscattering method with the purpose of increasing its sensitivity to investigation of light surface dopants is discussed. The equation for calculation if the necessary initial energy of incident ions was obtained. The investigation of surface dopants in silicon is discussed as a example. 4 refs.; 2 figs.}
place = {Ukraine}
year = {1990}
month = {Dec}
}
title = {Use of polarized ion beams in nuclear microanalysis; Ispol`zovanie puchkov polyarizovannykh ionov v yadernom mikrokanalize}
author = {Soroka, V I}
abstractNote = {The possibility to make use of polarized ion beams in the backscattering method with the purpose of increasing its sensitivity to investigation of light surface dopants is discussed. The equation for calculation if the necessary initial energy of incident ions was obtained. The investigation of surface dopants in silicon is discussed as a example. 4 refs.; 2 figs.}
place = {Ukraine}
year = {1990}
month = {Dec}
}