Abstract
Carbon in the diamond crystalline state is a material of considerable technological importance because of its combination of different properties peculiar to ceramics, e.g., hardness and stability, with good optical and electrical characteristics. The latter ones suggest the use of diamond-like carbon films in microelectronics and optoelectronics. In fact, in the diamond state, carbon shows both high thermal conductivity, low electrical conductivity and a large band gap, which are required in high-power and high-temperature components. Furthermore diamond-like carbon is characterized by an excellent optical transmission from FIR to UV, which, coupled with its mechanical properties, suggests its use in the coating of optical elements and light detectors. This paper reports on the use of space resolved, on-line spontaneous and stimulated emission and C.A.R.S. diagnostics on CH/sub 4/H/sub 2/ mixtures excited by rf-discharge in order to investigate the chemical processes and the gas phase kinetics in the plasma.
Citation Formats
Fantoni, R, Giorgi, M, Moliterni, A G.G., Berden, W C.M., Lazic, V, and Polla-Mattiot, F.
On-line gas-phase optical diagnostics in plasma CVD deposition of Carbon films.
Italy: N. p.,
1992.
Web.
Fantoni, R, Giorgi, M, Moliterni, A G.G., Berden, W C.M., Lazic, V, & Polla-Mattiot, F.
On-line gas-phase optical diagnostics in plasma CVD deposition of Carbon films.
Italy.
Fantoni, R, Giorgi, M, Moliterni, A G.G., Berden, W C.M., Lazic, V, and Polla-Mattiot, F.
1992.
"On-line gas-phase optical diagnostics in plasma CVD deposition of Carbon films."
Italy.
@misc{etde_10128926,
title = {On-line gas-phase optical diagnostics in plasma CVD deposition of Carbon films}
author = {Fantoni, R, Giorgi, M, Moliterni, A G.G., Berden, W C.M., Lazic, V, and Polla-Mattiot, F}
abstractNote = {Carbon in the diamond crystalline state is a material of considerable technological importance because of its combination of different properties peculiar to ceramics, e.g., hardness and stability, with good optical and electrical characteristics. The latter ones suggest the use of diamond-like carbon films in microelectronics and optoelectronics. In fact, in the diamond state, carbon shows both high thermal conductivity, low electrical conductivity and a large band gap, which are required in high-power and high-temperature components. Furthermore diamond-like carbon is characterized by an excellent optical transmission from FIR to UV, which, coupled with its mechanical properties, suggests its use in the coating of optical elements and light detectors. This paper reports on the use of space resolved, on-line spontaneous and stimulated emission and C.A.R.S. diagnostics on CH/sub 4/H/sub 2/ mixtures excited by rf-discharge in order to investigate the chemical processes and the gas phase kinetics in the plasma.}
place = {Italy}
year = {1992}
month = {Dec}
}
title = {On-line gas-phase optical diagnostics in plasma CVD deposition of Carbon films}
author = {Fantoni, R, Giorgi, M, Moliterni, A G.G., Berden, W C.M., Lazic, V, and Polla-Mattiot, F}
abstractNote = {Carbon in the diamond crystalline state is a material of considerable technological importance because of its combination of different properties peculiar to ceramics, e.g., hardness and stability, with good optical and electrical characteristics. The latter ones suggest the use of diamond-like carbon films in microelectronics and optoelectronics. In fact, in the diamond state, carbon shows both high thermal conductivity, low electrical conductivity and a large band gap, which are required in high-power and high-temperature components. Furthermore diamond-like carbon is characterized by an excellent optical transmission from FIR to UV, which, coupled with its mechanical properties, suggests its use in the coating of optical elements and light detectors. This paper reports on the use of space resolved, on-line spontaneous and stimulated emission and C.A.R.S. diagnostics on CH/sub 4/H/sub 2/ mixtures excited by rf-discharge in order to investigate the chemical processes and the gas phase kinetics in the plasma.}
place = {Italy}
year = {1992}
month = {Dec}
}