Abstract
A high density plasma was produced by radio-frequency in a multicusp plasma generator. The generator is a cylindrical chamber of 200 mm in inner diameter and 270 mm in length with 1-3 turn copper tube antenna. By injecting a 2 MHz, 20 kW RF into the multicusp plasma generator, hydrogen plasma of an ion saturation current density of 120 mA/cm{sup 2} and a hydrogen plasma of a density of 6.0 x 10{sup 11} cm{sup -3} was produced at a pressure of 0.6 Pa in the generator. The ion saturation current density was uniform over the central area of 100 mm in diameter. Coating the antenna with an insulator, we proved that the efficiency of the plasma production was improved. (author).
Suzuki, Yasuo;
Hanada, Masaya;
Okumura, Yoshikazu;
Tanaka, Masanobu
[1]
- Japan Atomic Energy Research Inst., Naka, Ibaraki (Japan). Naka Fusion Research Establishment
Citation Formats
Suzuki, Yasuo, Hanada, Masaya, Okumura, Yoshikazu, and Tanaka, Masanobu.
High density plasma production in a multicusp plasma generator with RF antenna.
Japan: N. p.,
1992.
Web.
Suzuki, Yasuo, Hanada, Masaya, Okumura, Yoshikazu, & Tanaka, Masanobu.
High density plasma production in a multicusp plasma generator with RF antenna.
Japan.
Suzuki, Yasuo, Hanada, Masaya, Okumura, Yoshikazu, and Tanaka, Masanobu.
1992.
"High density plasma production in a multicusp plasma generator with RF antenna."
Japan.
@misc{etde_10123235,
title = {High density plasma production in a multicusp plasma generator with RF antenna}
author = {Suzuki, Yasuo, Hanada, Masaya, Okumura, Yoshikazu, and Tanaka, Masanobu}
abstractNote = {A high density plasma was produced by radio-frequency in a multicusp plasma generator. The generator is a cylindrical chamber of 200 mm in inner diameter and 270 mm in length with 1-3 turn copper tube antenna. By injecting a 2 MHz, 20 kW RF into the multicusp plasma generator, hydrogen plasma of an ion saturation current density of 120 mA/cm{sup 2} and a hydrogen plasma of a density of 6.0 x 10{sup 11} cm{sup -3} was produced at a pressure of 0.6 Pa in the generator. The ion saturation current density was uniform over the central area of 100 mm in diameter. Coating the antenna with an insulator, we proved that the efficiency of the plasma production was improved. (author).}
place = {Japan}
year = {1992}
month = {Oct}
}
title = {High density plasma production in a multicusp plasma generator with RF antenna}
author = {Suzuki, Yasuo, Hanada, Masaya, Okumura, Yoshikazu, and Tanaka, Masanobu}
abstractNote = {A high density plasma was produced by radio-frequency in a multicusp plasma generator. The generator is a cylindrical chamber of 200 mm in inner diameter and 270 mm in length with 1-3 turn copper tube antenna. By injecting a 2 MHz, 20 kW RF into the multicusp plasma generator, hydrogen plasma of an ion saturation current density of 120 mA/cm{sup 2} and a hydrogen plasma of a density of 6.0 x 10{sup 11} cm{sup -3} was produced at a pressure of 0.6 Pa in the generator. The ion saturation current density was uniform over the central area of 100 mm in diameter. Coating the antenna with an insulator, we proved that the efficiency of the plasma production was improved. (author).}
place = {Japan}
year = {1992}
month = {Oct}
}