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Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes

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Abstract

High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO{sub 2}/SiO{sub 2}/Si and PZT/Pt/Ti/SiO{sub 2}/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO{sub 2} electrodes. The RuO{sub 2}/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO{sub 2} and PZT, as evidenced by the atomic resolution images as well as energy dispersive X-ray analysis. A nanocrystalline pyrochlore phase Pb{sub 2}ZrTiO{sub 7-x} (x {ne} 1) was found on the top surface of the PZT layer. The PZT/Pt/Ti/SiO{sub 2}/Si thin film was well-crystallized and showed sharp interfaces throughout. Possible reasons for the improved fatigue characteristics of PZT/RuO{sub 2}/SiO{sub 2}/Si thin films are discussed. 13 refs; 7 figs.
Authors:
Publication Date:
Dec 31, 1994
Product Type:
Technical Report
Report Number:
UM-P-93/74
Reference Number:
SCA: 360202; 360203; PA: AIX-26:019976; EDB-95:044394; SN: 95001338240
Resource Relation:
Other Information: PBD: [1994]
Subject:
36 MATERIALS SCIENCE; PZT; ELECTRODES; MICROSTRUCTURE; THIN FILMS; FATIGUE; EXPERIMENTAL DATA; FERROELECTRIC MATERIALS; INTERFACES; PHYSICAL PROPERTIES; PLATINUM; RUTHENIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X-RAY RADIOGRAPHY; 360202; 360203; STRUCTURE AND PHASE STUDIES; MECHANICAL PROPERTIES
Sponsoring Organizations:
Australian Research Council, Canberra, ACT (Australia)
OSTI ID:
10122740
Research Organizations:
Melbourne Univ., Parkville, VIC (Australia). School of Physics
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE95617597; TRN: AU9414195019976
Availability:
OSTI; NTIS (US Sales Only); INIS
Submitting Site:
INIS
Size:
17 p.
Announcement Date:
Jun 30, 2005

Technical Report:

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Citation Formats

Bursill, L A, and Reaney, I M. Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes. Australia: N. p., 1994. Web.
Bursill, L A, & Reaney, I M. Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes. Australia.
Bursill, L A, and Reaney, I M. 1994. "Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes." Australia.
@misc{etde_10122740,
title = {Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes}
 author = {Bursill, L A, and Reaney, I M}
 abstractNote = {High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO{sub 2}/SiO{sub 2}/Si and PZT/Pt/Ti/SiO{sub 2}/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO{sub 2} electrodes. The RuO{sub 2}/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO{sub 2} and PZT, as evidenced by the atomic resolution images as well as energy dispersive X-ray analysis. A nanocrystalline pyrochlore phase Pb{sub 2}ZrTiO{sub 7-x} (x {ne} 1) was found on the top surface of the PZT layer. The PZT/Pt/Ti/SiO{sub 2}/Si thin film was well-crystallized and showed sharp interfaces throughout. Possible reasons for the improved fatigue characteristics of PZT/RuO{sub 2}/SiO{sub 2}/Si thin films are discussed. 13 refs; 7 figs.}
 place = {Australia}
 year = {1994}
 month = {Dec}
 }