Abstract
The outgassing rate of a small test chamber made of 304 type stainless steel has been measured as a function of pumping speed in a range from 0.3 to 200 {iota}s. In the experiment the chamber has been first exposed to the air and then pumped with different pumping speeds for 3 days at room temperature of 20 degC without baking. The typical outgassing rates of the chamber are determined from the measurement of steady pressures at the pumping time of 72 h. As a result of experiment, it is found that measured outgassing rates q obey a set of power laws of q{sub 1}=c{sub 1}(S/A){sup m}1 and q{sub 2}=c{sub 2}(S/A){sup m}2 where S/A is the ratio of pumping speed S to surface area A of the chamber, c{sub 1} and c{sub 2} are constants, exponents of m{sub 1} and m{sub 2} are 0.8282 for S/A{>=} 10{sup -3} {iota}/scm{sup 2} and 0.4655 for S/A{<=} 10{sup -3} {iota}/scm{sup 2}, respectively. Technical application of the obtained scaling law is discussed in connection with the design of pumping system for a large vacuum device. (author).
Citation Formats
Akaishi, Kenya, Kubota, Yusuke, Ezaki, Kazuhiro, and Motojima, Osamu.
Experimental study on scaling law of outgassing rate with a pumping parameter.
Japan: N. p.,
1994.
Web.
Akaishi, Kenya, Kubota, Yusuke, Ezaki, Kazuhiro, & Motojima, Osamu.
Experimental study on scaling law of outgassing rate with a pumping parameter.
Japan.
Akaishi, Kenya, Kubota, Yusuke, Ezaki, Kazuhiro, and Motojima, Osamu.
1994.
"Experimental study on scaling law of outgassing rate with a pumping parameter."
Japan.
@misc{etde_10121588,
title = {Experimental study on scaling law of outgassing rate with a pumping parameter}
author = {Akaishi, Kenya, Kubota, Yusuke, Ezaki, Kazuhiro, and Motojima, Osamu}
abstractNote = {The outgassing rate of a small test chamber made of 304 type stainless steel has been measured as a function of pumping speed in a range from 0.3 to 200 {iota}s. In the experiment the chamber has been first exposed to the air and then pumped with different pumping speeds for 3 days at room temperature of 20 degC without baking. The typical outgassing rates of the chamber are determined from the measurement of steady pressures at the pumping time of 72 h. As a result of experiment, it is found that measured outgassing rates q obey a set of power laws of q{sub 1}=c{sub 1}(S/A){sup m}1 and q{sub 2}=c{sub 2}(S/A){sup m}2 where S/A is the ratio of pumping speed S to surface area A of the chamber, c{sub 1} and c{sub 2} are constants, exponents of m{sub 1} and m{sub 2} are 0.8282 for S/A{>=} 10{sup -3} {iota}/scm{sup 2} and 0.4655 for S/A{<=} 10{sup -3} {iota}/scm{sup 2}, respectively. Technical application of the obtained scaling law is discussed in connection with the design of pumping system for a large vacuum device. (author).}
place = {Japan}
year = {1994}
month = {Aug}
}
title = {Experimental study on scaling law of outgassing rate with a pumping parameter}
author = {Akaishi, Kenya, Kubota, Yusuke, Ezaki, Kazuhiro, and Motojima, Osamu}
abstractNote = {The outgassing rate of a small test chamber made of 304 type stainless steel has been measured as a function of pumping speed in a range from 0.3 to 200 {iota}s. In the experiment the chamber has been first exposed to the air and then pumped with different pumping speeds for 3 days at room temperature of 20 degC without baking. The typical outgassing rates of the chamber are determined from the measurement of steady pressures at the pumping time of 72 h. As a result of experiment, it is found that measured outgassing rates q obey a set of power laws of q{sub 1}=c{sub 1}(S/A){sup m}1 and q{sub 2}=c{sub 2}(S/A){sup m}2 where S/A is the ratio of pumping speed S to surface area A of the chamber, c{sub 1} and c{sub 2} are constants, exponents of m{sub 1} and m{sub 2} are 0.8282 for S/A{>=} 10{sup -3} {iota}/scm{sup 2} and 0.4655 for S/A{<=} 10{sup -3} {iota}/scm{sup 2}, respectively. Technical application of the obtained scaling law is discussed in connection with the design of pumping system for a large vacuum device. (author).}
place = {Japan}
year = {1994}
month = {Aug}
}