Abstract
Problems relating to physical processes defining operation of pumps with non-sputtered getters: gas adsorption on solid body surface, in particular sorption of hydrogen and other gases by non-sputtered getters; gas diffusion in non-sputtered getter volume; gas solubility in getters involving formation of chemical compounds and solid solutions. Information on design, pumping-out characteristics of the pumps with non-sputtered getters (sorption-diffusion) and pumping-out modular is presented. 46 refs.; 39 figs.; 18 tabs.
Citation Formats
Kogan, V S, and Shulaev, V M.
Adsorption-diffusion vacuum pumps (vacuum pumps with non-sputtered getter); Adsorbtsionno-diffuzionnye vakuumnye nasosy (vakkumnye nasosy s neraspylyaemym getterom).
Ukraine: N. p.,
1989.
Web.
Kogan, V S, & Shulaev, V M.
Adsorption-diffusion vacuum pumps (vacuum pumps with non-sputtered getter); Adsorbtsionno-diffuzionnye vakuumnye nasosy (vakkumnye nasosy s neraspylyaemym getterom).
Ukraine.
Kogan, V S, and Shulaev, V M.
1989.
"Adsorption-diffusion vacuum pumps (vacuum pumps with non-sputtered getter); Adsorbtsionno-diffuzionnye vakuumnye nasosy (vakkumnye nasosy s neraspylyaemym getterom)."
Ukraine.
@misc{etde_10118920,
title = {Adsorption-diffusion vacuum pumps (vacuum pumps with non-sputtered getter); Adsorbtsionno-diffuzionnye vakuumnye nasosy (vakkumnye nasosy s neraspylyaemym getterom)}
author = {Kogan, V S, and Shulaev, V M}
abstractNote = {Problems relating to physical processes defining operation of pumps with non-sputtered getters: gas adsorption on solid body surface, in particular sorption of hydrogen and other gases by non-sputtered getters; gas diffusion in non-sputtered getter volume; gas solubility in getters involving formation of chemical compounds and solid solutions. Information on design, pumping-out characteristics of the pumps with non-sputtered getters (sorption-diffusion) and pumping-out modular is presented. 46 refs.; 39 figs.; 18 tabs.}
place = {Ukraine}
year = {1989}
month = {Dec}
}
title = {Adsorption-diffusion vacuum pumps (vacuum pumps with non-sputtered getter); Adsorbtsionno-diffuzionnye vakuumnye nasosy (vakkumnye nasosy s neraspylyaemym getterom)}
author = {Kogan, V S, and Shulaev, V M}
abstractNote = {Problems relating to physical processes defining operation of pumps with non-sputtered getters: gas adsorption on solid body surface, in particular sorption of hydrogen and other gases by non-sputtered getters; gas diffusion in non-sputtered getter volume; gas solubility in getters involving formation of chemical compounds and solid solutions. Information on design, pumping-out characteristics of the pumps with non-sputtered getters (sorption-diffusion) and pumping-out modular is presented. 46 refs.; 39 figs.; 18 tabs.}
place = {Ukraine}
year = {1989}
month = {Dec}
}