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Hydrogen and deuterium in multi-crystalline silicon wafers and solar cells

Conference:

Abstract

Hydrogen and deuterium plasma treatments were performed on the front side of p-type multi-crystalline silicon wafers with and without emitter, and of solar cells. These treatments were performed at temperatures around 150{sup o}C and 250{sup o}C for 15 to 90 minutes. Chemical depth profiling of deuterium and electrical profiling of hydrogen and deuterium were carried out using SIMS. To correlate the concentration of hydrogen and deuterium to the effect of passivation, this concentration, the minority carrier diffusion length and changes in the cell parameters are compared. 2 figs., 1 tabs., 6 refs.
Authors:
Weeber, A W; De Moor, H H.C.; Steeman, R A; Sinke, W C; [1]  Schuurmans, F M; Michiels, P P; Verhoef, L A; [2]  Alkemade, P F.A.; Algra, E [3] 
  1. Netherlands Energy Research Foundation ECN, Petten (Netherlands)
  2. R&S Renewable Energy Systems BV, Helmond (Netherlands)
  3. Delft Institute for Microelectronics and Submicron Technology DIMES, Delft (Netherlands)
Publication Date:
Sep 01, 1993
Product Type:
Conference
Report Number:
ECN-RX-93-099; CONF-931120-
Reference Number:
SCA: 140501; PA: ECN-93:0E0962; EDB-94:017733; NTS-94:008521; ERA-19:006467; SN: 94001127539
Resource Relation:
Conference: 7. international photovoltaic science and engineering conference,Nagoya (Japan),22-26 Nov 1993; Other Information: DN: This work is carried out within the framework of the NOVEM National Research Programme Solar Energy-Photovoltaics and the ECN programme ENGINE; PBD: Sep 1993
Subject:
14 SOLAR ENERGY; SILICON SOLAR CELLS; IMPURITIES; HYDROGEN; PASSIVATION; CONCENTRATION RATIO; DIFFUSION; CORRELATIONS; DEUTERIUM; PHOTOCONDUCTIVITY; PARAMETRIC ANALYSIS; DIFFUSION LENGTH; 140501; PHOTOVOLTAIC CONVERSION
OSTI ID:
10115950
Research Organizations:
Netherlands Energy Research Foundation (ECN), Petten (Netherlands)
Country of Origin:
Netherlands
Language:
English
Other Identifying Numbers:
Other: ON: DE94729850; CNN: Contract NOVEM 41.220-026.1; Project ECN 4413; TRN: NL93E0962
Availability:
OSTI; NTIS; Available from the library of the Netherlands Energy Research Foundation (ECN), P.O. Box 1, 1755 ZG Petten (Netherlands)
Submitting Site:
ECN
Size:
2 p.
Announcement Date:
Jun 30, 2005

Conference:

Citation Formats

Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, Verhoef, L A, Alkemade, P F.A., and Algra, E. Hydrogen and deuterium in multi-crystalline silicon wafers and solar cells. Netherlands: N. p., 1993. Web.
Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, Verhoef, L A, Alkemade, P F.A., & Algra, E. Hydrogen and deuterium in multi-crystalline silicon wafers and solar cells. Netherlands.
Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, Verhoef, L A, Alkemade, P F.A., and Algra, E. 1993. "Hydrogen and deuterium in multi-crystalline silicon wafers and solar cells." Netherlands.
@misc{etde_10115950,
title = {Hydrogen and deuterium in multi-crystalline silicon wafers and solar cells}
author = {Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, Verhoef, L A, Alkemade, P F.A., and Algra, E}
abstractNote = {Hydrogen and deuterium plasma treatments were performed on the front side of p-type multi-crystalline silicon wafers with and without emitter, and of solar cells. These treatments were performed at temperatures around 150{sup o}C and 250{sup o}C for 15 to 90 minutes. Chemical depth profiling of deuterium and electrical profiling of hydrogen and deuterium were carried out using SIMS. To correlate the concentration of hydrogen and deuterium to the effect of passivation, this concentration, the minority carrier diffusion length and changes in the cell parameters are compared. 2 figs., 1 tabs., 6 refs.}
place = {Netherlands}
year = {1993}
month = {Sep}
}