You need JavaScript to view this

Hydrogen and deuterium in semi-crystalline silicon wafers and solar cells

Conference:

Abstract

Hydrogen and deuterium plasma treatments were performed on the front side of p-type semi-crystalline silicon wafers with and without emitter, and of solar cells. These treatments were performed at temperatures around 150{sup o}C and 250{sup o}C for 15 to 90 minutes. Chemical depth profiling of deuterium and electrical profiling of hydrogen and deuterium were carried out using SIMS and the C-V profiling technique. To correlate the concentration of hydrogen and deuterium to the effect of passivation, this concentration, the minority carrier diffusion length and changes in the cell parameters are compared. 2 figs., 3 tabs., 8 refs.
Authors:
Weeber, A W; De Moor, H H.C.; Steeman, R A; Sinke, W C; [1]  Schuurmans, F M; Michiels, P P; Verhoef, L A [2] 
  1. Netherlands Energy Research Foundation ECN, Petten (Netherlands)
  2. R&S Renewable Energy Systems BV, Helmond (Netherlands)
Publication Date:
Sep 01, 1993
Product Type:
Conference
Report Number:
ECN-RX-93-100; CONF-930986-
Reference Number:
SCA: 140501; PA: ECN-93:0E0961; EDB-94:017732; NTS-94:008520; ERA-19:006468; SN: 94001127538
Resource Relation:
Conference: International symposium on the physics and technology of polycrystalline semiconductors,Saint Malo (France),5-10 Sep 1993; Other Information: DN: This work is carried out within the framework of the NOVEM National Research Programme Solar Energy-Photovoltaics and the ECN programme ENGINE; PBD: Sep 1993
Subject:
14 SOLAR ENERGY; SILICON SOLAR CELLS; IMPURITIES; HYDROGEN; PASSIVATION; CONCENTRATION RATIO; DIFFUSION; CORRELATIONS; DEUTERIUM; PHOTOCONDUCTIVITY; PARAMETRIC ANALYSIS; DIFFUSION LENGTH; 140501; PHOTOVOLTAIC CONVERSION
OSTI ID:
10115947
Research Organizations:
Netherlands Energy Research Foundation (ECN), Petten (Netherlands)
Country of Origin:
Netherlands
Language:
English
Other Identifying Numbers:
Other: ON: DE94729849; CNN: Contract NOVEM 41.220-026.1; Project ECN 4413; TRN: NL93E0961
Availability:
OSTI; NTIS; Available from the library of the Netherlands Energy Research Foundation (ECN), P.O. Box 1, 1755 ZG Petten (Netherlands)
Submitting Site:
ECN
Size:
6 p.
Announcement Date:
Jun 30, 2005

Conference:

Citation Formats

Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, and Verhoef, L A. Hydrogen and deuterium in semi-crystalline silicon wafers and solar cells. Netherlands: N. p., 1993. Web.
Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, & Verhoef, L A. Hydrogen and deuterium in semi-crystalline silicon wafers and solar cells. Netherlands.
Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, and Verhoef, L A. 1993. "Hydrogen and deuterium in semi-crystalline silicon wafers and solar cells." Netherlands.
@misc{etde_10115947,
title = {Hydrogen and deuterium in semi-crystalline silicon wafers and solar cells}
author = {Weeber, A W, De Moor, H H.C., Steeman, R A, Sinke, W C, Schuurmans, F M, Michiels, P P, and Verhoef, L A}
abstractNote = {Hydrogen and deuterium plasma treatments were performed on the front side of p-type semi-crystalline silicon wafers with and without emitter, and of solar cells. These treatments were performed at temperatures around 150{sup o}C and 250{sup o}C for 15 to 90 minutes. Chemical depth profiling of deuterium and electrical profiling of hydrogen and deuterium were carried out using SIMS and the C-V profiling technique. To correlate the concentration of hydrogen and deuterium to the effect of passivation, this concentration, the minority carrier diffusion length and changes in the cell parameters are compared. 2 figs., 3 tabs., 8 refs.}
place = {Netherlands}
year = {1993}
month = {Sep}
}