Abstract
Short communication. 1 fig.
Pourprix, M;
[1]
Mesbah, B
[2]
- CEA Centre d`Etudes de Fontenay-aux-Roses, 92 (France). Dept. de Protection de l`Environnement et des Installations
- Paris-12 Univ., 94 - Creteil (France)
Citation Formats
Pourprix, M, and Mesbah, B.
Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique.
France: N. p.,
1992.
Web.
Pourprix, M, & Mesbah, B.
Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique.
France.
Pourprix, M, and Mesbah, B.
1992.
"Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique."
France.
@misc{etde_10109494,
title = {Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique}
author = {Pourprix, M, and Mesbah, B}
abstractNote = {Short communication. 1 fig.}
place = {France}
year = {1992}
month = {Dec}
}
title = {Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique}
author = {Pourprix, M, and Mesbah, B}
abstractNote = {Short communication. 1 fig.}
place = {France}
year = {1992}
month = {Dec}
}