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Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique

Technical Report:

Abstract

Short communication. 1 fig.
Authors:
Pourprix, M; [1]  Mesbah, B [2] 
  1. CEA Centre d`Etudes de Fontenay-aux-Roses, 92 (France). Dept. de Protection de l`Environnement et des Installations
  2. Paris-12 Univ., 94 - Creteil (France)
Publication Date:
Dec 31, 1992
Product Type:
Technical Report
Report Number:
CEA-CONF-11529; CONF-9205383-
Reference Number:
SCA: 400102; PA: AIX-25:001786; EDB-94:013817; ERA-19:004615; NTS-94:014049; SN: 93001119600
Resource Relation:
Conference: Workshops on electrostatic,Poitiers (France),12-13 May 1992; Other Information: PBD: 1992
Subject:
37 INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY; AEROSOLS; DEPOSITS; ELECTROSTATIC SPECTROMETERS; COATINGS; DEPOSITION; ELECTROSTATIC ANALYZERS; ELECTROSTATICS; PARTICLE MOBILITY; SPECTROSCOPY; 400102; CHEMICAL AND SPECTRAL PROCEDURES
OSTI ID:
10109494
Research Organizations:
CEA Centre d`Etudes de Fontenay-aux-Roses, 92 (France). Dept. de Protection de l`Environnement et des Installations
Country of Origin:
France
Language:
French
Other Identifying Numbers:
Other: ON: DE94608489; TRN: FR9303729001786
Availability:
OSTI; NTIS (US Sales Only); INIS
Submitting Site:
FRN
Size:
2 p.
Announcement Date:
Jan 03, 1994

Technical Report:

Citation Formats

Pourprix, M, and Mesbah, B. Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique. France: N. p., 1992. Web.
Pourprix, M, & Mesbah, B. Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique. France.
Pourprix, M, and Mesbah, B. 1992. "Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique." France.
@misc{etde_10109494,
title = {Electrostatic deposit of aerosols on silicon wafers - application to the microelectronic industry; Depot electrostatique d`aerosols sur tranches de silicium - Application a l`industrie micro-electronique}
author = {Pourprix, M, and Mesbah, B}
abstractNote = {Short communication. 1 fig.}
place = {France}
year = {1992}
month = {Dec}
}