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Thermodynamic analysis of processes proceeding on (111) faces of diamond during chemical vapour deposition

Technical Report:

Abstract

Chemically vapour deposited diamond is commonly synthesized from activated hydrogen-rich, carbon/hydrogen gas mixtures under conditions which should, from a thermodynamic equilibrium point of view, favour the production of graphite. Much remains to be understood about why diamond, and not graphite, forms under these conditions. However, it is well known that the presence of atomic hydrogen, is crucial to the success of diamond deposition. As part of an attempt to better understand the deposition process, a thermodynamic analysis of the process was performed on diamond (111) faces in hydrogen rich environments. It is shown that the key role of atomic hydrogen is to inhibit the reconstruction of the (111) face to an sp{sup 2}-bonded structure, which would provide a template for graphite, rather than diamond formation. The model correctly predicts experimentally determined trends in growth rate and diamond film quality as a function of methane concentration in the stating gas mixture. 17 refs., 4 figs.
Publication Date:
Dec 31, 1992
Product Type:
Technical Report
Report Number:
UM-P-92/06
Reference Number:
SCA: 360602; 665000; PA: AIX-24:000649; SN: 93000912808
Resource Relation:
Other Information: PBD: [1992]
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CRYSTAL GROWTH; THERMODYNAMIC MODEL; DIAMONDS; CHEMICAL VAPOR DEPOSITION; DEHYDROGENATION; DESORPTION; HYDROGEN; METHANE; THEORETICAL DATA; THIN FILMS; 360602; 665000; STRUCTURE AND PHASE STUDIES; PHYSICS OF CONDENSED MATTER
Sponsoring Organizations:
Office of Naval Research, Washington, DC (United States)
OSTI ID:
10108663
Research Organizations:
Melbourne Univ., Parkville, VIC (Australia). School of Physics
Country of Origin:
Australia
Language:
English
Other Identifying Numbers:
Other: ON: DE93609039; CNN: Contract N00014-86-K0443; TRN: AU9212931000649
Availability:
OSTI; NTIS (US Sales Only); INIS
Submitting Site:
INIS
Size:
[17] p.
Announcement Date:
Jun 30, 2005

Technical Report:

Citation Formats

Piekarczyk, W, and Prawer, S. Thermodynamic analysis of processes proceeding on (111) faces of diamond during chemical vapour deposition. Australia: N. p., 1992. Web.
Piekarczyk, W, & Prawer, S. Thermodynamic analysis of processes proceeding on (111) faces of diamond during chemical vapour deposition. Australia.
Piekarczyk, W, and Prawer, S. 1992. "Thermodynamic analysis of processes proceeding on (111) faces of diamond during chemical vapour deposition." Australia.
@misc{etde_10108663,
title = {Thermodynamic analysis of processes proceeding on (111) faces of diamond during chemical vapour deposition}
author = {Piekarczyk, W, and Prawer, S}
abstractNote = {Chemically vapour deposited diamond is commonly synthesized from activated hydrogen-rich, carbon/hydrogen gas mixtures under conditions which should, from a thermodynamic equilibrium point of view, favour the production of graphite. Much remains to be understood about why diamond, and not graphite, forms under these conditions. However, it is well known that the presence of atomic hydrogen, is crucial to the success of diamond deposition. As part of an attempt to better understand the deposition process, a thermodynamic analysis of the process was performed on diamond (111) faces in hydrogen rich environments. It is shown that the key role of atomic hydrogen is to inhibit the reconstruction of the (111) face to an sp{sup 2}-bonded structure, which would provide a template for graphite, rather than diamond formation. The model correctly predicts experimentally determined trends in growth rate and diamond film quality as a function of methane concentration in the stating gas mixture. 17 refs., 4 figs.}
place = {Australia}
year = {1992}
month = {Dec}
}