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Emergence of coherent surface structures during sputtering of amorphous materials by ion beams; Vozniknovenie kogerentnykh poverkhnostnykh struktur pri raspylenii amorfnykh materialov ionnymi puchkami

Technical Report:

Abstract

The process of production of complex coherent periodic structures on the sputtered material surface is investigated. The depth of the beam ion penetration to under the sputtered material surface depends on its form. This results in the sputtering coefficient local fluctuations corresponding to the surface roughness: the rate of cavity sputtering would exceed that one of hillocks. The related instability, developing under the surface sputtering can lead to the occurrence of surface structures. The basic unstable mode parameters (wave length, instability increment) are calculated within the framework of cascade theory and linear approximation. 8 refs.; 1 fig.
Publication Date:
Dec 31, 1990
Product Type:
Technical Report
Report Number:
KFTI-90-1
Reference Number:
SCA: 665300; PA: AIX-22:081937; SN: 91000608980
Resource Relation:
Other Information: PBD: 1990
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; SURFACES; SPUTTERING; AMORPHOUS STATE; AMPLITUDES; ANALYTICAL SOLUTION; INCIDENCE ANGLE; ION BEAMS; RANGE; ROUGHNESS; 665300; INTERACTIONS BETWEEN BEAMS AND CONDENSED MATTER
OSTI ID:
10105139
Research Organizations:
AN Ukrainskoj SSR, Kharkov (Ukraine). Fiziko-Tekhnicheskij Inst.
Country of Origin:
Ukraine
Language:
Russian
Other Identifying Numbers:
Other: ON: DE92609291; TRN: UA9100107081937
Availability:
OSTI; NTIS (US Sales Only); INIS
Submitting Site:
INIS
Size:
9 p.
Announcement Date:
Jun 30, 2005

Technical Report:

Citation Formats

Latinskij, S M, Tur, A V, and Yanovskij, V V. Emergence of coherent surface structures during sputtering of amorphous materials by ion beams; Vozniknovenie kogerentnykh poverkhnostnykh struktur pri raspylenii amorfnykh materialov ionnymi puchkami. Ukraine: N. p., 1990. Web.
Latinskij, S M, Tur, A V, & Yanovskij, V V. Emergence of coherent surface structures during sputtering of amorphous materials by ion beams; Vozniknovenie kogerentnykh poverkhnostnykh struktur pri raspylenii amorfnykh materialov ionnymi puchkami. Ukraine.
Latinskij, S M, Tur, A V, and Yanovskij, V V. 1990. "Emergence of coherent surface structures during sputtering of amorphous materials by ion beams; Vozniknovenie kogerentnykh poverkhnostnykh struktur pri raspylenii amorfnykh materialov ionnymi puchkami." Ukraine.
@misc{etde_10105139,
title = {Emergence of coherent surface structures during sputtering of amorphous materials by ion beams; Vozniknovenie kogerentnykh poverkhnostnykh struktur pri raspylenii amorfnykh materialov ionnymi puchkami}
author = {Latinskij, S M, Tur, A V, and Yanovskij, V V}
abstractNote = {The process of production of complex coherent periodic structures on the sputtered material surface is investigated. The depth of the beam ion penetration to under the sputtered material surface depends on its form. This results in the sputtering coefficient local fluctuations corresponding to the surface roughness: the rate of cavity sputtering would exceed that one of hillocks. The related instability, developing under the surface sputtering can lead to the occurrence of surface structures. The basic unstable mode parameters (wave length, instability increment) are calculated within the framework of cascade theory and linear approximation. 8 refs.; 1 fig.}
place = {Ukraine}
year = {1990}
month = {Dec}
}