Abstract
Charge-exchange collisions and radio-frequency excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-In-Cell simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulation. (author) 6 figs., 1 tab., 15 refs.
Fivaz, M;
Brunner, S;
Schwarzenbach, W;
Howling, A A;
Hollenstein, C
[1]
- Ecole Polytechnique Federale, Lausanne (Switzerland). Centre de Recherche en Physique des Plasma (CRPP)
Citation Formats
Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C.
Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution.
Switzerland: N. p.,
1994.
Web.
Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, & Hollenstein, C.
Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution.
Switzerland.
Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C.
1994.
"Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution."
Switzerland.
@misc{etde_10103979,
title = {Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution}
author = {Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C}
abstractNote = {Charge-exchange collisions and radio-frequency excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-In-Cell simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulation. (author) 6 figs., 1 tab., 15 refs.}
place = {Switzerland}
year = {1994}
month = {Oct}
}
title = {Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution}
author = {Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C}
abstractNote = {Charge-exchange collisions and radio-frequency excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-In-Cell simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulation. (author) 6 figs., 1 tab., 15 refs.}
place = {Switzerland}
year = {1994}
month = {Oct}
}