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Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution

Technical Report:

Abstract

Charge-exchange collisions and radio-frequency excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-In-Cell simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulation. (author) 6 figs., 1 tab., 15 refs.
Authors:
Fivaz, M; Brunner, S; Schwarzenbach, W; Howling, A A; Hollenstein, C [1] 
  1. Ecole Polytechnique Federale, Lausanne (Switzerland). Centre de Recherche en Physique des Plasma (CRPP)
Publication Date:
Oct 01, 1994
Product Type:
Technical Report
Report Number:
LRP-507/94
Reference Number:
SCA: 700320; PA: AIX-26:009157; EDB-95:011439; SN: 95001301996
Resource Relation:
Other Information: PBD: Oct 1994
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ELECTRIC POTENTIAL; SPATIAL DISTRIBUTION; IONS; ENERGY SPECTRA; PLASMA; ARGON; PLASMA SHEATH; CHARGE-EXCHANGE REACTIONS; ELECTRODES; EXCITATION; EXPERIMENTAL DATA; PEAKS; PLASMA DIAGNOSTICS; RF SYSTEMS; THEORETICAL DATA; 700320; PLASMA DIAGNOSTIC TECHNIQUES AND INSTRUMENTATION
OSTI ID:
10103979
Research Organizations:
Ecole Polytechnique Federale, Lausanne (Switzerland). Centre de Recherche en Physique des Plasma (CRPP)
Country of Origin:
Switzerland
Language:
English
Other Identifying Numbers:
Other: ON: DE95611639; TRN: CH9400367009157
Availability:
OSTI; NTIS; INIS
Submitting Site:
CHN
Size:
18 p.
Announcement Date:
Jun 30, 2005

Technical Report:

Citation Formats

Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C. Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution. Switzerland: N. p., 1994. Web.
Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, & Hollenstein, C. Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution. Switzerland.
Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C. 1994. "Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution." Switzerland.
@misc{etde_10103979,
title = {Reconstruction of the time-averaged sheath potential profile in an argon RF plasma using the ion energy distribution}
author = {Fivaz, M, Brunner, S, Schwarzenbach, W, Howling, A A, and Hollenstein, C}
abstractNote = {Charge-exchange collisions and radio-frequency excitation combine to give peaks in the ion energy distribution measured at the ground electrode of an argon plasma in a capacitive reactor. These peaks are used as a diagnostic to reconstruct the profile of the time-averaged potential in the sheath. Particle-In-Cell simulations show that the method is accurate. The method is applied to investigate the sheath thickness as a function of excitation frequency at constant plasma power. The time-averaged potential is found to be parabolic in both experimental measurements and numerical simulation. (author) 6 figs., 1 tab., 15 refs.}
place = {Switzerland}
year = {1994}
month = {Oct}
}