Abstract
The vacuum system with a common supply of sputter pumps for UNK has experimentally been investigated. It is shown that one power supply source connected directly to several pumps provides their reliable operation both in the starting modes at 6.6 Pa -5x10{sup -7} Pa. The modes of treating the chamber with the discharge in argone have been studies. It become clear that the chamber might be treated with special electrodes connected to the collective power supply. The scheme to measure the discharge current in the pump which uses the Holl pickup has been worked out and tested. It allows one to measure the current within the range from 1 {mu}A to 700 mA with a 10-20% accuracy. The results obtained may be used in designing power supply and control circuits in the vacuum facilities with a large number of sputter pumps. 3 refs.; 5 figs.; 1 tab.
Citation Formats
Antonov, S S, Pylaev, A N, Rogozinskij, V G, and Kholkina, A I.
Investigation of the vacuum system with a common power supply of sputter-ion pumps and measuring current discharge with a Hall pickup; Issledovanie vakuumnoj sistemy s kollektivnym ehlektropitaniem magnitorazryadnykh nasosov i izmereniem toka razryada datchikom Kholla.
USSR: N. p.,
1989.
Web.
Antonov, S S, Pylaev, A N, Rogozinskij, V G, & Kholkina, A I.
Investigation of the vacuum system with a common power supply of sputter-ion pumps and measuring current discharge with a Hall pickup; Issledovanie vakuumnoj sistemy s kollektivnym ehlektropitaniem magnitorazryadnykh nasosov i izmereniem toka razryada datchikom Kholla.
USSR.
Antonov, S S, Pylaev, A N, Rogozinskij, V G, and Kholkina, A I.
1989.
"Investigation of the vacuum system with a common power supply of sputter-ion pumps and measuring current discharge with a Hall pickup; Issledovanie vakuumnoj sistemy s kollektivnym ehlektropitaniem magnitorazryadnykh nasosov i izmereniem toka razryada datchikom Kholla."
USSR.
@misc{etde_10102453,
title = {Investigation of the vacuum system with a common power supply of sputter-ion pumps and measuring current discharge with a Hall pickup; Issledovanie vakuumnoj sistemy s kollektivnym ehlektropitaniem magnitorazryadnykh nasosov i izmereniem toka razryada datchikom Kholla}
author = {Antonov, S S, Pylaev, A N, Rogozinskij, V G, and Kholkina, A I}
abstractNote = {The vacuum system with a common supply of sputter pumps for UNK has experimentally been investigated. It is shown that one power supply source connected directly to several pumps provides their reliable operation both in the starting modes at 6.6 Pa -5x10{sup -7} Pa. The modes of treating the chamber with the discharge in argone have been studies. It become clear that the chamber might be treated with special electrodes connected to the collective power supply. The scheme to measure the discharge current in the pump which uses the Holl pickup has been worked out and tested. It allows one to measure the current within the range from 1 {mu}A to 700 mA with a 10-20% accuracy. The results obtained may be used in designing power supply and control circuits in the vacuum facilities with a large number of sputter pumps. 3 refs.; 5 figs.; 1 tab.}
place = {USSR}
year = {1989}
month = {Dec}
}
title = {Investigation of the vacuum system with a common power supply of sputter-ion pumps and measuring current discharge with a Hall pickup; Issledovanie vakuumnoj sistemy s kollektivnym ehlektropitaniem magnitorazryadnykh nasosov i izmereniem toka razryada datchikom Kholla}
author = {Antonov, S S, Pylaev, A N, Rogozinskij, V G, and Kholkina, A I}
abstractNote = {The vacuum system with a common supply of sputter pumps for UNK has experimentally been investigated. It is shown that one power supply source connected directly to several pumps provides their reliable operation both in the starting modes at 6.6 Pa -5x10{sup -7} Pa. The modes of treating the chamber with the discharge in argone have been studies. It become clear that the chamber might be treated with special electrodes connected to the collective power supply. The scheme to measure the discharge current in the pump which uses the Holl pickup has been worked out and tested. It allows one to measure the current within the range from 1 {mu}A to 700 mA with a 10-20% accuracy. The results obtained may be used in designing power supply and control circuits in the vacuum facilities with a large number of sputter pumps. 3 refs.; 5 figs.; 1 tab.}
place = {USSR}
year = {1989}
month = {Dec}
}