Simple chemical vapour deposition method for depositing thin TiO/sub 2/ films Yeung, K S; Lam, Y W 14 SOLAR ENERGY; 36 MATERIALS SCIENCE; SILICON; ANTIREFLECTION COATINGS; SOLAR CELLS; FABRICATION; TITANIUM OXIDES; CHEMICAL VAPOR DEPOSITION; ELECTRICAL PROPERTIES; EXPERIMENTAL DATA; MEDIUM TEMPERATURE; REFRACTIVITY; THICKNESS; THIN FILMS; CHALCOGENIDES; CHEMICAL COATING; COATINGS; DATA; DEPOSITION; DIMENSIONS; DIRECT ENERGY CONVERTERS; ELEMENTS; EQUIPMENT; FILMS; INFORMATION; NUMERICAL DATA; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRIC CELLS; PHOTOVOLTAIC CELLS; PHYSICAL PROPERTIES; SEMIMETALS; SOLAR EQUIPMENT; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 140501* - Solar Energy Conversion- Photovoltaic Conversion; 360601 - Other Materials- Preparation & Manufacture Thin films of TiO/sub 2/ were produced at 130-250/sup 0/C by chemical vapour deposition (CVD) involving the hydrolysis of TiCl/sub 4/. An apparatus was developed which gives good control and reproducibility. The reaction takes place on a heated disc that rotates the silicon substrate. Premature reaction between the gases, TiCl/sub 4/ and water vapour is prevented by appropriate temperature control and careful design of the gas delivery system. With this apparatus the thickness of the TiO/sub 2/ films is controlled to within +-5% of the target value. Attention is also directed to reducing the pinhole density of the resulting films. The refractive index of the TiO/sub 2/ films was found to increase with increasing deposition temperature, from 2.1 at around 130/sup 0/C to 2.4 at 250/sup 0/C. From capacitance-voltage measurements the surface charge at the TiO/sub 2/-Si interface of films deposited at 200/sup 0/C was found to be negative. Hence these TiO/sub 2/ films are good antireflection coatings for n-type metal/insulator/semiconductor inversion layer solar cells. Switzerland 1983-11-11 English Journal Article Journal Name: Thin Solid Films; (Switzerland); Journal Volume: 109:2 Medium: X; Size: Pages: 169-178 https://doi.org/10.1016/0040-6090(83)90136-0 [] 109:2 Journal ID: CODEN: THSFA EDB-84-090557 2010-05-18 6907089